TEL Tokyo Electron CPC-T0033A-12输入输出模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：CPC-T0033A-12
产品名称：输入输出模块（Input/Output Module）
制造商：Tokyo Electron Limited（TEL）
产品类别：I/O 接口板 / 控制扩展模块
修订版本：-12 表示该型号的第 12 版，适配特定设备配置或软件版本
二、主要功能
| 功能类别 | 描述 |
|---|---|
| 数字输入 | 接收开关量信号，如限位开关、传感器、按钮状态等 |
| 数字输出 | 控制执行器，如电磁阀、继电器、指示灯等开/关状态 |
| 模拟接口（视配置） | 部分版本可能支持模拟量输入/输出，用于采集电压、电流、温度等信号 |
| 信号隔离与缓冲 | 提供电气隔离与信号稳定性，避免设备间干扰 |
| 系统通信接口 | 连接主控制单元，实现实时数据传输与控制指令响应 |
三、应用场景
CPC-T0033A-12 广泛应用于 TEL 的多种半导体设备中，用于实现设备信号的统一管理与执行控制，常见于：
光刻前后处理设备（如 ACT 系列）：
控制显影臂、传感器反馈、液体控制阀门、升降机构等CVD / Etch 系统：
接收压力、真空、气体流量等信号，控制开关元件、辅助机构搬运系统 / Transfer Modules：
管理搬运机械臂、转台限位、门锁控制等关键动作信号
英文资料：
1、 Basic Information
Product model: CPC-T0033A-12
Product Name: Input/Output Module
Manufacturer: Tokyo Electron Limited (TEL)
Product Category: I/O Interface Board/Control Expansion Module
Revision version: -12 represents the 12th edition of this model, adapted to specific device configurations or software versions
2、 Main functions
Functional category description
Digital input receives switch signals, such as limit switches, sensors, button status, etc
Digital output controls the on/off status of actuators such as solenoid valves, relays, indicator lights, etc
Partial versions of the analog interface (depending on configuration) may support analog input/output for collecting signals such as voltage, current, temperature, etc
Signal isolation and buffering provide electrical isolation and signal stability, avoiding interference between devices
The system communication interface is connected to the main control unit to achieve real-time data transmission and control command response
3、 Application scenarios
CPC-T0033A-12 is widely used in various semiconductor devices of TEL to achieve unified management and execution control of device signals. It is commonly used in:
Photolithography pre-processing and post-processing equipment (such as ACT series):
Control the developing arm, sensor feedback, liquid control valve, lifting mechanism, etc
CVD/Etch system:
Receive signals such as pressure, vacuum, gas flow, etc., and control switch components and auxiliary mechanisms
Transfer Modules:
Manage key action signals such as handling robotic arm, turntable limit, door lock control, etc
2.产 品 展 示
3.其他产品
4.其他英文产品
DEIF LSU-113DG voltage regulator
AFP9075355 3BHS537443 voltage regulator
| 139-H-FLC-NFS | 5136-SD-VME | 710-603180-003 |
| 139-H-FLC | MMII-PD-1-2-120 | 208-500117-1 |
| 139-DO-NFS-FLC | MMII-PD-MOD522-240 | 710-102570-02 |
| 139-DO-FLC | 889-EP5P5G5LSSALAGAPFCSENNBN | 193X802DAG01 |
| 139-120V | 889-EP5P5G5HSSAANGMPFBSENNBN | 531X112PSAARG1 |
| 1300-50-01 | 889-EP5P5G5HRRALAGAPFCSENNBN | 193X805AEG03 |
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