TEL Tokyo Electron 3281-000146-12驱动器模块 PDF资料
1.产 品 资 料 介 绍:
中文资料:
一、基本信息
产品型号:3281-000146-12
产品名称:驱动器模块(Driver Module)
制造商:Tokyo Electron(TEL)
模块类别:执行机构驱动模块
版本号:12 版(特定修订版本)
二、主要功能
电机驱动:为步进电机、伺服电机或其他执行机构提供控制信号与驱动力
执行动作控制:根据主控指令控制设备机械动作的启动、停止、转速及位置
信号处理:处理反馈信号,实现闭环控制
保护功能:过流、过压、过热等保护,保障模块和设备安全
三、典型应用领域
半导体制造设备中机械臂、传送机构的驱动
涂胶显影设备中的旋转平台驱动
蚀刻设备内气体流量阀门或真空泵驱动
搬运系统、升降台、定位装置等的执行单元
英文资料:
1、 Basic Information
Product model: 3281-000146-12
Product Name: Driver Module
Manufacturer: Tokyo Electron (TEL)
Module category: actuator driver module
Version number: 12th edition (specific revised version)
2、 Main functions
Motor drive: provides control signals and driving force for stepper motors, servo motors, or other actuators
Execution action control: Control the start, stop, speed, and position of the mechanical action of the equipment according to the main control instructions
Signal processing: Processing feedback signals to achieve closed-loop control
Protection function: overcurrent, overvoltage, overheating and other protections to ensure the safety of modules and equipment
3、 Typical application areas
Drive of robotic arms and conveyor mechanisms in semiconductor manufacturing equipment
Rotating platform drive in coating and developing equipment
Gas flow valve or vacuum pump drive inside etching equipment
Execution units for handling systems, lifting platforms, positioning devices, etc
2.产 品 展 示
3.其他产品
BENTLY 3500/22M 146031-01瞬态数据接口模块
KOLLMORGEN AKM42E-EKGNR-01伺服电机
4.其他英文产品
ABB 70BK03c-E Control I/O Module
269PLUS-100N-120 | SV3440-01000 | 92-005649-XXX |
269-120N-120VAC | S5101 | 710-611536-000 |
269-10C-HI | SP11000-443C2 | 712-404057-00 |
269-10C-240 | 54404-00 | F31X139APMAGG3 |
269-10C-125VDC | CACR-SR-03SZ1SS | 720-24399-001 |
269-10C-120 | CACR-SR15BC1KSY392 | 830-23611-000 |
269-100P-HI | CACR-SR30BE12D-C | F31X121PCRAAG1 |
本篇文章出自瑞昌明盛自动化设备有限公司官网,转载请附上此链接:http://www.jiangxidcs