TEL Tokyo Electron 2981-600550-11输入输出模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：2981-600550-11
产品名称：输入输出模块（I/O Module）
制造商：TEL — Tokyo Electron Limited（东京电子）
模块类别：数字/模拟输入输出板，常用于设备内部信号控制系统
修订版本：11（代表第11版，适用于特定硬件或固件版本）
二、主要功能
| 功能分类 | 功能描述 |
|---|---|
| 数字输入 | 接收外部信号，如传感器、按钮、接近开关等状态反馈。 |
| 数字输出 | 向设备执行器发出开/关控制信号，如继电器、电磁阀、灯光等。 |
| 模拟接口 | 可能支持部分模拟信号（如温度、压力、电压等）的采集与输出（若配置有模拟通道）。 |
| 信号中转/隔离 | 实现上位控制系统与底层设备之间的电气隔离和信号放大。 |
| 模块间通信 | 与主控制板或PLC进行高速数据交换，支持 TEL 专用通信协议。 |
三、典型应用领域
该模块广泛应用于 TEL 半导体设备的多个子系统中，主要包括：
涂胶显影系统（Coater/Developer）
控制显影泵、加热台、排气风扇、液体阀门、真空模块等。
蚀刻系统（Etcher）
监控腔体气体状态，控制流量切换阀、高频电源状态、腔体门等。
CVD / ALD 薄膜沉积设备
管理温控系统、真空压力监测、气体切换、等离子体启动信号等。
搬运与真空接口系统
用于检测腔体门开闭、升降平台位置、机械臂状态等信号反馈。
英文资料：
1、 Basic Information
Product model: 2981-600550-11
Product Name: I/O Module
Manufacturer: TEL - Tokyo Electron Limited
Module category: Digital/Analog Input/Output Board, commonly used for internal signal control systems of equipment
Revised version: 11 (representing the 11th edition, applicable to specific hardware or firmware versions)
2、 Main functions
Function Classification Function Description
Digital inputs receive external signals such as sensors, buttons, proximity switches, and other status feedback.
Digital output sends on/off control signals to device actuators, such as relays, solenoid valves, lights, etc.
The analog interface may support the acquisition and output of some analog signals (such as temperature, pressure, voltage, etc.) (if configured with analog channels).
Signal relay/isolation realizes electrical isolation and signal amplification between the upper control system and the underlying equipment.
High speed data exchange between modules and the main control board or PLC, supporting TEL dedicated communication protocol.
3、 Typical application areas
This module is widely used in multiple subsystems of TEL semiconductor equipment, mainly including:
Coater/Developer system
Control the developing pump, heating station, exhaust fan, liquid valve, vacuum module, etc.
Etcher system
Monitor the gas status of the chamber, control the flow switching valve, high-frequency power status, chamber door, etc.
CVD/ALD thin film deposition equipment
Manage temperature control system, vacuum pressure monitoring, gas switching, plasma start signal, etc.
Handling and Vacuum Interface System
Used to detect the opening and closing of the chamber door, the position of the lifting platform, the status of the robotic arm, and other signal feedback.
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA 2668 0002-AE Connection Unit Circui
ABB P8840 8-channel temperature module
| 345-E-P5-G5-H-E-S-N-N-SN-D-N | 531X300CCHASM3 | IC3603A177AF2 |
| 345-E-P5-G5-H-E-S-N-N-3E-D-N | 531X300CCHANM3 | IC3603A177AD2 |
| 345-E-P5-G5-H-E-S-N-N-1E-D-H | 531X300CCHAMM3 | IC3603A177AB2 |
| 345-E-P5-G5-H-E-M-N-N-3E-D-H | AMAT 0100-00409 | IC3603A143 |
| 345-E-P5-G5-H-E-M-N-N-2E-N-N | AMAT 0100-09117 | IC3600VRCC1A |
| 345-E-P1-G1-L-E-E-N-N-SN-D-N | AMAT 0100-03012 | IC3600VRCC1 |
| 345-E-P1-G1-H-E-S-N-N-SN-D-N | AMAT 0100-20026 | IC3600VRCA1 |
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