TEL Tokyo Electron BX81-070098-14控制器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron BX81-070098-14 控制器模块 是一款用于半导体制造设备中的专用控制板，广泛用于 Tokyo Electron 的设备控制系统中，尤其是精密工艺流程中的子系统控制、信号分发、执行动作驱动等关键任务。
一、基本信息
产品型号：BX81-070098-14
产品名称：控制器模块（Controller Module）
制造商：TEL（Tokyo Electron Limited）
模块类型：高集成度控制器/驱动器板
适用设备：可能属于 TEL CLEAN TRACK、ACT 系列、或配套设备的子模块
二、主要功能
| 功能分类 | 描述 |
|---|---|
| 控制功能 | 通过接收主控系统命令，控制执行器（如马达、阀门、气体流通、光源等）动作。 |
| 数据通信 | 与主系统或其他子模块进行实时数据交互，执行反馈、指令传输等任务。 |
| 电气驱动 | 提供一定功率的驱动能力，用于驱动硬件设备或中间继电器。 |
| 状态监测 | 实时检测当前运行状态，如温度、电压、执行位置等。 |
| 故障保护 | 内置电路保护机制，防止过流、短路、信号异常等影响主系统稳定性。 |
英文资料：
The TEL Tokyo Electron BX81-070098-14 controller module is a specialized control board used in semiconductor manufacturing equipment, widely used in Tokyo Electron's equipment control system, especially for key tasks such as subsystem control, signal distribution, and execution action driving in precision process flow.
1、 Basic Information
Product model: BX81-070098-14
Product Name: Controller Module
Manufacturer: TEL (Tokyo Electron Limited)
Module type: High integration controller/driver board
Applicable equipment: Sub modules that may belong to TEL CLEAN TRACK, ACT series, or supporting equipment
2、 Main functions
Functional classification description
The control function controls the actions of actuators (such as motors, valves, gas circulation, light sources, etc.) by receiving commands from the main control system.
Real time data exchange between data communication and the main system or other sub modules, performing tasks such as feedback and instruction transmission.
Electrical drive provides a certain power driving capability for driving hardware devices or intermediate relays.
Real time monitoring of the current operating status, such as temperature, voltage, execution position, etc.
Fault protection is a built-in circuit protection mechanism that prevents overcurrent, short circuit, signal abnormalities, and other factors from affecting the stability of the main system.
2.产 品 展 示
3.其他产品
4.其他英文产品
Asea 2668 170-3 Pcb Circuit Board
ASEA SNAT7600 driver control circuit board
| 3HAB2207-1 | 531X302DCIABG3 | IC3603A328A |
| 3BSE003911R0001 PFRA101 | 531X302DCIAAG5 | IC3603A300A |
| 3BSE003911R0001 | 531X301DCCCAM1 | IC3603A291A |
| 369-LO-R-M-0-D-0-E | 531X301DCCBAG1 | IC3603A290A |
| 369-LO-0-M-F-E-0 | 531X301DCCAXM1 | IC3603A285A |
| 369-HI-R-M-F-P-H-E | 531X301DCCAWM1 | IC3603A282A |
| 369-HI-R-M-F-0-H-E | 531X301DCCATM1 | IC3603A281A |
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