TEL Tokyo Electron 381-6400994-2控制器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 381-6400994-2 控制器模块 是一款应用于 Tokyo Electron 半导体制造设备中的专用电子控制部件，广泛集成于核心系统中，负责子系统的管理与协调。以下是该模块的详细介绍（无图案）：
一、基本信息
产品型号：381-6400994-2
产品名称：控制器模块（Controller Module）
制造商：TEL（Tokyo Electron Limited）
用途分类：设备控制模块 / 信号处理单元
所属系统：适用于 TEL 的 CVD、Etch、Coater/Developer 等关键系统
二、主要功能与作用
| 功能类别 | 说明 |
|---|---|
| 设备控制核心 | 管理一个或多个执行单元，如阀门、马达、加热器、传感器等子系统的运行状态与逻辑顺序。 |
| 信号采集与传输 | 接收传感器、编码器等的输入信号，并将处理结果传送至主控系统。 |
| 状态监测与反馈 | 反馈当前执行情况（温度、真空、气压、位置等）供上层判断是否继续操作。 |
| 接口桥接 | 实现上位机（主控板）与各执行模块之间的数字/模拟信号转换与同步。 |
该模块通常安装在以下类型的 TEL 设备中：
CVD（化学气相沉积）设备
控制沉积气体流量、电源、温度、真空腔体等。
Etcher（蚀刻设备）
管理 RF 功率输出、等离子气体流量、气压、腔体控制等。
Coater/Developer（涂胶显影设备）
控制涂胶旋转平台、显影泵送系统、加热/冷却单元等。
真空搬运系统
控制腔体门开闭、机械手臂移动、气压平衡等流程。
The TEL Tokyo Electron 381-6400994-2 controller module is a specialized electronic control component used in Tokyo Electron semiconductor manufacturing equipment, widely integrated into the core system, responsible for subsystem management and coordination. The following is a detailed introduction to the module (without patterns):
1、 Basic Information
Product model: 381-6400994-2
Product Name: Controller Module
Manufacturer: TEL (Tokyo Electron Limited)
Usage classification: Equipment control module/signal processing unit
System: Applicable to key systems such as CVD, Etch, Coater/Developer for TEL
2、 Main functions and functions
Function category description
The device control core manages the operational status and logical sequence of one or more execution units, such as valves, motors, heaters, sensors, and other subsystems.
Signal acquisition and transmission receive input signals from sensors, encoders, etc., and transmit the processing results to the main control system.
Status monitoring and feedback provide the current execution status (temperature, vacuum, air pressure, position, etc.) for the upper level to determine whether to continue the operation.
Interface bridging enables digital/analog signal conversion and synchronization between the upper computer (main control board) and various execution modules.
3、 Typical application areas
This module is typically installed in the following types of TEL devices:
CVD (Chemical Vapor Deposition) equipment
Control the flow rate of sedimentation gas, power supply, temperature, vacuum chamber, etc.
Etcher (etching equipment)
Manage RF power output, plasma gas flow rate, gas pressure, chamber control, etc.
Coater/Developer
Control the adhesive rotating platform, developing pump system, heating/cooling unit, etc.
Vacuum handling system
Control the process of opening and closing the chamber door, moving the robotic arm, and balancing the air pressure.
2.产 品 展 示
3.其他产品
4.其他英文产品
AMAT 0190-11415 Digital Input Module
ABB XVC768117 Field Input/Output Module
| 40PA59-55-TEFC-S | 193X735ACG01 | 067-10098-0000 |
| 40PA58-53-TEFC-S | PRD-SC30000Z-41 | 0AF00 |
| 40PA57-36-37-TENV-S | SS2000MD7-RC | 6ES5306-7LA11 |
| 40PA56-55-TEFC-G | SS2000MD4-101 | 53575-00001-C |
| 40PA54-36-37-TEFC-S | 51350-60 | SH845GV |
| 3RX1240-0AS00 | S20660-CNS | 4116J79G2 |
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