TEL Tokyo Electron EPC-T0091A-11输入输出模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、功能概述
EPC-T0091A-11 输入输出模块是 TEL 半导体设备中控制系统的关键部件，主要用于在主控系统与设备执行/检测元件之间传递和转换信号。其核心功能包括：
接收来自传感器的各种输入信号（如光电、限位、温度、压力等）
向执行器输出控制信号（如继电器、电磁阀、马达驱动器等）
实现控制逻辑中的联锁判断、报警触发、信号中继和状态反馈
作为 TEL EPC 系列控制平台的一部分参与设备自动化流程控制
二、典型应用领域
该 I/O 模块广泛应用于 TEL 各类设备中的以下控制区域：
1. 晶圆搬运系统（Transfer System）
管理机械臂、载台、旋转轴的传感器与马达信号
实现搬运路径上的多点检测与动作控制
2. 气体/液体流体系统（Gas/Chemical Handling）
采集 MFC、压力传感器、液位开关等输入信号
输出控制信号至电磁阀、泵、气体分配装置
3. 真空系统与 Loadlock 区域
检测真空状态、闸门位置、温度和报警条件
控制真空阀门开关、电加热元件等
4. 清洗/光刻辅助系统（Wet Station / Litho Support）
实时管理喷淋、烘干、旋转平台等设备子功能
维持多变量工艺条件下的精准控制输出
英文资料：
1、 Function Overview
The EPC-T0091A-11 input/output module is a key component of the control system in TEL semiconductor equipment, mainly used to transmit and convert signals between the main control system and equipment execution/detection elements. Its core functions include:
Receive various input signals from sensors (such as photoelectric, limit, temperature, pressure, etc.)
Output control signals to actuators (such as relays, solenoid valves, motor drivers, etc.)
Implement interlocking judgment, alarm triggering, signal relay, and status feedback in control logic
Participate in equipment automation process control as part of TEL EPC series control platform
2、 Typical application areas
This I/O module is widely used in the following control areas of various TEL devices:
1. Wafer Transfer System
Manage sensors and motor signals for robotic arms, platforms, and rotating axes
Realize multi-point detection and action control on the transportation path
2. Gas/Chemical Handling System
Collect input signals from MFC, pressure sensors, liquid level switches, etc
Output control signals to solenoid valves, pumps, and gas distribution devices
3. Vacuum system and Loadlock area
Detect vacuum status, gate position, temperature, and alarm conditions
Control vacuum valve switches, electric heating elements, etc
4. Cleaning/Litho Support System (Wet Station/Litho Support)
Real time management of equipment sub functions such as spraying, drying, and rotating platforms
Maintain precise control output under multivariate process conditions
2.产 品 展 示
3.其他产品
4.其他英文产品
RADISYS 061-05927-0031 adapter module
KOLLMORGEN S70602-NANANA servo/driver
| 6DD2920-0AW0 | CACR-SR30SBBFY100 | 3BHB003688R0101 |
| 6DD2920-0AV3 | CACR-PR01AC3ER | 44A751101-G01 |
| 6DD2920-0AV1 | CACR-UIR05050FD | 6ES5513-3LB11 |
| 6DD2920-0AV0 | 6SC6100-0NC11 | GDC806A0101 |
| 6DD2920-0AU1 | CACR-IR020202FC | UNS0119A-P,V101 |
| 6DD2920-0AU0 | CACR-SR30BE12G-E | 6ES5498-1AA51 |
| 6DD2920-0AS1 | CACR-IR44SEB | UCD240A101 |
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