TEL Tokyo Electron 381-642277-1限制板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 381-642277-1 限制板
类别：限制板 / 限幅板（Limiter Board）
制造商：Tokyo Electron Ltd.（TEL）
一、产品功能概述
该限制板是 TEL 半导体设备系统中的辅助电路模块，主要功能通常包括：
对输入电压、电流或信号幅度进行限制、保护或调节
防止信号过载，保护后级电路或精密部件
提供特定信号范围内的滤波、钳位或稳压控制
在设备异常或边界状态下触发保护机制或报警功能
二、典型应用领域
该模块通常应用于以下系统中，以保护关键部件或稳定信号质量：
1. 气体控制系统
限制压力/流量传感器信号波动，确保阀门控制电路稳定
防止突发信号扰动影响气体精密供应
2. 电源与驱动控制系统
针对电压/电流控制信号进行过压/欠压保护
限制电机启动瞬间的冲击电流或反向电压
3. I/O 接口与通信系统
限幅外部输入信号，防止信号异常导致控制系统损坏
提高系统抗干扰能力
4. 安全联锁回路
限制或中断危险状态下的电源或执行命令
实现联锁触发逻辑中的“限制条件”判断
英文资料：
TEL Tokyo Electron 381-642277-1 restriction board
Category: Limiter Board
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This restriction board is an auxiliary circuit module in TEL semiconductor equipment system, and its main functions usually include:
Limit, protect, or regulate input voltage, current, or signal amplitude
Prevent signal overload, protect downstream circuits or precision components
Provide filtering, clamping, or voltage stabilization control within a specific signal range
Trigger protection mechanisms or alarm functions in case of device abnormalities or boundary states
2、 Typical application areas
This module is typically applied in the following systems to protect critical components or stabilize signal quality:
1. Gas control system
Limit pressure/flow sensor signal fluctuations to ensure valve control circuit stability
Prevent sudden signal disturbances from affecting precise gas supply
2. Power supply and drive control system
Overvoltage/undervoltage protection for voltage/current control signals
Limit the impulse current or reverse voltage at the moment of motor start-up
3. I/O interface and communication system
Limiting external input signals to prevent signal abnormalities from causing damage to the control system
Improve the anti-interference ability of the system
4. Safety interlock circuit
Restricting or interrupting power supply or executing commands in hazardous conditions
Realize the judgment of "limiting conditions" in the interlocking triggering logic
2.产 品 展 示
3.其他产品
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