TEL Tokyo Electron 5044-000334-11输入输出模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 5044-000334-11 输入输出模块
类别：输入输出模块（I/O Module）
制造商：Tokyo Electron Ltd.（TEL）
一、产品功能概述
该输入输出模块是TEL半导体设备系统中的关键接口单元，主要用于：
采集来自设备传感器的数字和模拟输入信号
向执行机构（如继电器、电磁阀、电机驱动器等）发送控制信号
实现设备内部信号的转换、分配和状态反馈
支持与主控系统的通讯接口，保证数据传输的可靠性
二、典型应用领域
工艺控制子系统
监测温度、压力、流量等工艺参数输入，控制相关输出装置晶圆搬运系统
采集机械手、载台等动作信号，控制对应执行单元气体供应与真空系统
监控气体阀门状态，控制真空泵、阀门开关安全联锁系统
实现设备安全条件的输入监测和输出控制，确保操作安全
三、技术特性
支持多通道数字和模拟输入输出
具备电气隔离功能，提升信号稳定性
标准化接口设计，方便与TEL控制系统其他模块连接
高可靠性设计，适应半导体制造洁净室环境
支持现场诊断与状态指示功能
英文资料：
TEL Tokyo Electron 5044-000334-11 Input/Output Module
Category: Input/Output Module
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This input/output module is a key interface unit in TEL semiconductor equipment systems, mainly used for:
Collect digital and analog input signals from device sensors
Send control signals to actuators (such as relays, solenoid valves, motor drivers, etc.)
Realize the conversion, distribution, and status feedback of internal signals within the device
Support communication interface with the main control system to ensure reliable data transmission
2、 Typical application areas
Process control subsystem
Monitor process parameter inputs such as temperature, pressure, and flow rate, and control related output devices
Wafer handling system
Collect action signals from robotic arms, platforms, etc., and control corresponding execution units
Gas supply and vacuum system
Monitor the status of gas valves, control vacuum pumps and valve switches
Safety Interlock System
Implement input monitoring and output control of equipment safety conditions to ensure operational safety
3、 Technical characteristics
Support multi-channel digital and analog input/output
Equipped with electrical isolation function to enhance signal stability
Standardized interface design for easy connection with other modules of TEL control system
High reliability design, suitable for semiconductor manufacturing cleanroom environment
Support on-site diagnosis and status indication function
2.产 品 展 示
3.其他产品
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