TEL Tokyo Electron 1181-000450-14控制单元模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1181-000450-14 控制单元模块
类别：控制单元模块（Control Unit Module）
制造商：Tokyo Electron Ltd.（TEL）
一、产品功能概述
该控制单元模块是TEL半导体制造设备中的核心电子模块，主要用于：
集成处理设备子系统的控制信号和反馈信号
负责工艺执行与状态监控的逻辑控制
协调设备中各子模块的动作顺序和联锁保护
实现与主控CPU板或上位机系统的通信接口
二、典型应用领域
气体控制系统
控制气体阀门开关、气流量调节
监测气体压力和流量传感器状态
真空系统管理
监控真空泵、阀门开关和压力状态
实现真空系统的安全联锁与保护
晶圆搬运系统
控制机械臂、载台动作及位置传感
保障搬运动作的安全和精准
加热与冷却系统
管理加热器电源和风扇启动
控制温度设定和异常保护
英文资料：
TEL Tokyo Electron 1181-000450-14 Control Unit Module
Category: Control Unit Module
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This control unit module is the core electronic module in TEL semiconductor manufacturing equipment, mainly used for:
Control signals and feedback signals of integrated processing equipment subsystems
Responsible for logical control of process execution and status monitoring
Coordinate the sequence of actions and interlocking protection of each submodule in the equipment
Implement communication interface with the main control CPU board or upper computer system
2、 Typical application areas
gas control system
Control gas valve opening and closing, gas flow regulation
Monitor the status of gas pressure and flow sensors
Vacuum system management
Monitor the vacuum pump, valve switches, and pressure status
Realize safety interlocking and protection of vacuum system
Wafer handling system
Control the movement and position sensing of the robotic arm and platform
Ensure the safety and precision of handling actions
Heating and cooling system
Manage heater power and fan startup
Control temperature setting and abnormal protection
2.产 品 展 示
3.其他产品
4.其他英文产品
AMAT 0190-24282 encoder module
AMAT 0190-11415 Digital Input Module
GE D20 EME 10BASE-T Digital Control Modu
| 6ES5464-8ME11 | CACR-SR12 | JRMSP-P8101 |
| 6ES5464-8MA11 | CACR-IR15SEB | V23057-B3028-A101 |
| 6ES5460-7LA13 | CACR-JU102ADABY500AA | MP2101 |
| 6ES5458-7LB11 | CACR-U1R050505FD | 6MD1010-0BA00 |
| 6ES5458-4UA12 | CACR-CSL15DAAA | -8MA04 |
| 6ES5456-7LB11 | CACR-SR03SB1BFY187 | UTX1010 |
| 6ES5-456-7LA11 | CACR-SR44BF1WFY | TRICONEX 3610T |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs
