TEL Tokyo Electron 1D08-000130-11处理器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1D08-000130-11 处理器模块
类别：处理器模块 / Processor Module
制造商：Tokyo Electron Ltd.（TEL）
一、产品功能概述
该处理器模块是TEL半导体设备中的核心控制单元之一，主要功能包括：
执行设备的主要控制逻辑和运算任务
处理输入的传感器数据和控制命令
与其他模块（如I/O板、驱动板、继电器板等）通信协调
支持设备的自动化流程控制和状态监控
管理设备的系统参数和配置
二、典型应用领域
半导体制造设备主控制
运行工艺控制程序，协调设备动作和工艺参数
实现设备与上位系统（MES、工厂自动化系统）的通信
晶圆处理系统
管理晶圆搬运、腔体控制、气体供应等子系统的运行
实时处理工艺状态和报警信息
设备安全与联锁
执行安全逻辑判断，确保设备安全运行
监控关键参数，触发保护措施
三、技术特性
集成高性能微处理器或微控制器
支持多种通信接口（如以太网、串口、现场总线等）
内置存储器用于程序和数据保存
具有强抗干扰设计，适应工业环境
可通过固件升级实现功能扩展
英文资料：
TEL Tokyo Electron 1D08-000130-11 Processor Module
Category: Processor Module
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This processor module is one of the core control units in TEL semiconductor equipment, and its main functions include:
Execute the main control logic and computational tasks of the device
Process input sensor data and control commands
Communication and coordination with other modules such as I/O boards, driver boards, relay boards, etc
Support automated process control and status monitoring of equipment
Manage system parameters and configurations of devices
2、 Typical application areas
Main control of semiconductor manufacturing equipment
Run the process control program, coordinate equipment actions and process parameters
Realize communication between equipment and upper level systems (MES, factory automation system)
Wafer processing system
Manage the operation of subsystems such as wafer handling, chamber control, and gas supply
Real time processing of process status and alarm information
Equipment safety and interlocking
Perform safety logic judgment to ensure the safe operation of equipment
Monitor key parameters and trigger protective measures
3、 Technical characteristics
Integrate high-performance microprocessors or microcontrollers
Support multiple communication interfaces (such as Ethernet, serial port, fieldbus, etc.)
Built in memory for program and data storage
Strong anti-interference design, suitable for industrial environments
Function expansion can be achieved through firmware upgrade
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA E-31709 Robot Circuit Board
IS200EPSMG1ABB Analog Input Module
AMAT 0190-24282 encoder module
| 6ES5490-8MB11 | CACR-IR44SFBY8 | 61-0115-01 |
| 6ES5490-7SA21 | CACR-SR10BF1AMB | 60-0132-01 |
| 6ES5-490-7LB11 | CACR-UP130AABY21 | 61-0250-01 |
| 6ES5490-7LA21 | CACR-330-FF1VBDY71 | 60-0055-01 |
| 6ES5482-7LF21 | CACR-SR20BE | 61-0124-03 |
| 6ES5477-8EC11 | CACR-SR15BE13S | 5341852 |
| 6ES5470-7LC13 | CACR-SR06TZ9SMY02A | 3BHB005171R0101 |
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