TEL Tokyo Electron 3M81-036411-12气体压力监视板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3M81-036411-12 气体压力监视板
类别：气体压力监控模块 / Gas Pressure Monitoring Board
制造商：Tokyo Electron Ltd.（TEL）
一、产品功能概述
该气体压力监视板用于半导体制造设备中，主要实现对气体供应系统中压力的实时监测与反馈，功能包括：
采集气体管路或罐体中的压力信号
对压力值进行实时监测和状态判断
将压力状态信号传输给主控系统或安全联锁模块
实现超压、欠压报警及自动保护联动
支持多路压力传感器输入，提供多点监控
二、典型应用领域
气体供应系统
监控工艺气体、辅助气体、清洗气体等的压力状况
保障气体流量控制的稳定与安全
真空与惰性气体保护系统
监测真空泵入口及出口压力，防止气体泄漏或真空破坏
阀门与流量控制器保护
联动气体阀门开关，防止异常压力引发设备故障
工艺安全联锁
实现压力异常时自动断气或报警，保障设备与人员安全
三、技术特性
多通道压力信号输入，兼容多种压力传感器类型（如模拟电压、电流信号）
实时数据采集与数字信号输出
内置过压、欠压阈值设定与报警功能
可靠的电气隔离与抗干扰设计，适应洁净室环境
与TEL设备主控系统接口兼容，支持现场维护与校准
英文资料：
TEL Tokyo Electron 3M81-036411-12 Gas Pressure Monitoring Board
Category: Gas Pressure Monitoring Module/Gas Pressure Monitoring Board
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This gas pressure monitoring board is used in semiconductor manufacturing equipment, mainly to achieve real-time monitoring and feedback of pressure in the gas supply system. Its functions include:
Collect pressure signals from gas pipelines or tanks
Real time monitoring and status judgment of pressure values
Transmit pressure status signals to the main control system or safety interlock module
Realize overpressure and undervoltage alarm and automatic protection linkage
Support multiple pressure sensor inputs and provide multi-point monitoring
2、 Typical application areas
gas supply system
Monitor the pressure conditions of process gases, auxiliary gases, cleaning gases, etc
Ensure the stability and safety of gas flow control
Vacuum and Inert Gas Protection System
Monitor the inlet and outlet pressure of the vacuum pump to prevent gas leakage or vacuum damage
Valve and flow controller protection
Linkage gas valve switch to prevent equipment failure caused by abnormal pressure
Process safety interlock
Realize automatic gas cut-off or alarm in case of abnormal pressure, ensuring the safety of equipment and personnel
3、 Technical characteristics
Multi channel pressure signal input, compatible with multiple types of pressure sensors (such as analog voltage and current signals)
Real time data acquisition and digital signal output
Built in overvoltage and undervoltage threshold setting and alarm function
Reliable electrical isolation and anti-interference design, suitable for clean room environment
Compatible with TEL device control system interface, supporting on-site maintenance and calibration
2.产 品 展 示
3.其他产品
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