TEL Tokyo Electron 3M87-021634控制单元组件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号：3M87-021634
产品名称：控制单元组件（Control Unit Assembly）
制造商：Tokyo Electron Ltd.（TEL）
部件类型：子系统控制组件 / 电子控制模块组合件
一、功能简介
该控制单元组件是 TEL 半导体设备中的集成控制模块，可能由一个或多个电路板（如控制板、I/O板、驱动板）组合构成，安装在特定的控制箱或模块区内，主要用于：
控制和协调设备某一特定区域或子系统的运行
管理信号输入/输出、电源开关、动作执行等
实现本地逻辑判断、传感器反馈处理与联动控制
与主系统（如主控CPU板）通过通信接口互联
二、典型应用范围
刻蚀或沉积腔体（Etch/CVD/ALD）控制单元
控制气体阀、加热器、RF 匹配器、真空系统等部件。晶圆搬运系统（Transfer Arm/Load Port）
管理机械手动作、升降平台、位置感应器的协同运作。真空系统或 Loadlock 控制模块
控制真空泵启停、压力监控、电磁阀切换等。液体供应与清洗模块
控制 DI 水、化学液、吹干等操作流程。
三、技术特性（参考 TEL 控制组件通用结构）
由多块功能板卡组成，统一安装于金属外壳或托架上
配有标准工业连接器（D-sub、AMP、Hirose、MIL 接头等）
支持多路数字输入输出与模拟信号处理
部分可能含有继电器、电源调节、状态指示单元
可热插拔或模块化维护，更换效率高
英文资料：
Product model: 3M87-021634
Product Name: Control Unit Assembly
Manufacturer: Tokyo Electron Ltd. (TEL)
Component type: subsystem control component/electronic control module assembly
1、 Function Introduction
The control unit component is an integrated control module in TEL semiconductor equipment, which may be composed of one or more circuit boards (such as control board, I/O board, driver board) combined and installed in a specific control box or module area, mainly used for:
Control and coordinate the operation of a specific area or subsystem of equipment
Manage signal input/output, power switch, action execution, etc
Implement local logic judgment, sensor feedback processing, and linkage control
Interconnected with the main system (such as the main control CPU board) through communication interfaces
2、 Typical application scope
Etch/CVD/ALD control unit
Control gas valves, heaters, RF adapters, vacuum systems, and other components.
Wafer Transfer Arm/Load Port System
Manage the collaborative operation of robotic arm movements, lifting platforms, and position sensors.
Vacuum system or Loadlock control module
Control the start stop of vacuum pump, pressure monitoring, solenoid valve switching, etc.
Liquid supply and cleaning module
Control the operation process of DI water, chemical solution, blow drying, etc.
3、 Technical characteristics (refer to the general structure of TEL control components)
Composed of multiple functional boards, uniformly installed on a metal casing or bracket
Equipped with standard industrial connectors (D-sub, AMP, Hirose, MIL connectors, etc.)
Support multiple digital input/output and analog signal processing
Some may contain relays, power regulation, and status indicator units
Hot swappable or modular maintenance, high replacement efficiency
2.产 品 展 示
3.其他产品
Kollmorgen CB06561 PRD-B040SSLZ-62 伺服控制器
4.其他英文产品
AMAT 0190-24282 encoder module
IC3600EPSS1B power supply boar
| 6ES5734-5BD20 | CACR-UP130AABY18 | 061-00719-0027 |
| 6ES5734-1BD20 | CACR-SR03BB1AM | C52711-014R |
| 6ES5731-1BD20 | CACR-PR44BC3CSY165C | 60-0219-00 |
| 6ES5728-1BD00 | CACR-SR44SF1AFBY30 | EPC-26 |
| 6ES5727-1CD20 | CACR-SR44BY1SDY48E | 60-0147-02 |
| 6ES5727-0AA11 | CACR-SR10BE12G-E | 067-03351-0000 |
| 6ES5726-8BC00 | CACR-03-DS3BUH | 60-0263-00 |
| 6ES5726-1CB00 | CACR-SR44BC1CSY349 | 451806-003 |
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