TEL Tokyo Electron 2981-600410-11继电器板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 2981-600410-11 继电器板
类型：继电器控制模块 / Relay Interface PCB
制造商：Tokyo Electron Ltd.（TEL）
一、产品功能概述
2981-600410-11 继电器板 是 TEL 半导体设备中的电气控制部件，主要用于在设备内部实现：
控制信号的电气隔离与放大
中高功率负载（如泵、阀、电机等）的开关控制
通过主控或 PLC 信号触发继电器，实现电源回路闭合或切断
与安全联锁机制联动，在异常或启动流程中控制关键设备状态
二、典型应用领域
该继电器板广泛应用于 TEL 各类半导体制程设备中，具体包括：
1. 气体输送与 MFC 控制系统
控制气体通道中电磁阀的开启/关闭
实现工艺气体配比逻辑的硬件控制动作
2. 真空腔体控制系统
控制真空泵、真空阀门、压力保护装置等设备的运行状态
实现“真空保持”或“排气”过程的自动控制
3. 晶圆搬运系统（Load Port / Transfer Module）
控制升降台、机械手、定位机构等部件
触发动作执行机构并提供硬件反馈路径
4. 热处理与冷却系统
控制加热器电源、冷却风扇或液冷泵
实现温控子系统的开关逻辑联动
英文资料：
TEL Tokyo Electron 2981-600410-11 Relay Board
Type: Relay Control Module/Relay Interface PCB
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
The 2981-600410-11 relay board is an electrical control component in TEL semiconductor equipment, mainly used to implement:
Electrical isolation and amplification of control signals
Switching control of medium to high power loads (such as pumps, valves, motors, etc.)
By triggering the relay through the main control or PLC signal, the power circuit can be closed or cut off
Linkage with safety interlock mechanism to control critical equipment status during abnormal or startup processes
2、 Typical application areas
This relay board is widely used in various semiconductor process equipment of TEL, including:
1. Gas transportation and MFC control system
Control the opening/closing of solenoid valves in gas channels
Hardware control actions for implementing process gas ratio logic
2. Vacuum chamber control system
Control the operating status of equipment such as vacuum pumps, vacuum valves, pressure protection devices, etc
Realize automatic control of "vacuum maintenance" or "exhaust" processes
3. Wafer Handling System (Load Port/Transfer Module)
Control the lifting platform, robotic arm, positioning mechanism and other components
Trigger action execution mechanism and provide hardware feedback path
4. Heat treatment and cooling system
Control the power supply of the heater, cooling fan, or liquid cooling pump
Implement switch logic linkage of temperature control subsystem
2.产 品 展 示
3.其他产品
4.其他英文产品
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RADISYS 97-9536-20 Ethernet Port Module
Kollmorgen 6SM37M-6000 servo motor
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