TEL Tokyo Electron 1B80-002395-11区域板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1B80-002395-11 区域板
类型：电子区域控制板 / Area Board / Zone Interface Board
制造商：Tokyo Electron Ltd.（TEL）
一、产品功能概述
该区域板是 TEL 半导体设备内部用于分区域管理和控制的印刷电路板模块，负责协调设备中一个或多个“Zone（区域）”的信号输入输出、电源控制、传感器数据汇总等功能，常见于多腔体或多单元系统中。
主要功能包括：
管理特定区域（如一个腔体、加热单元、传输路径）的控制信号
集成传感器输入、执行器控制、阀门控制、温度或压力反馈
实现与主控板、I/O板、驱动板之间的接口中继
提供本地化的电源分配和信号隔离，提高系统稳定性和可维护性
二、典型应用领域
1. CVD、ALD 等薄膜沉积设备
控制特定腔体内的加热器、MFC（质量流量控制器）、真空阀门等
管理气体比例、温度分布、压力等工艺参数的区域控制
2. 等离子刻蚀设备（Etcher）
为某一区域提供高频电源接口、安全联锁、传感器反馈通道
实现多腔体协同工作控制
3. 晶圆搬运系统（Loadlock / Transfer Arm 区域）
控制升降平台、真空泵、位置传感器、门锁驱动等
实现区域间联动的精准信号传输和逻辑判断
4. 系统子模块独立电控管理
将复杂设备划分为若干“Zone”，每块区域板独立管理本区域信号和控制
支持模块化维护与更换，便于快速诊断与维修
英文资料：
TEL Tokyo Electron 1B80-002395-11 Area Board
Type: Electronic Area Control Board/Area Board/Zone Interface Board
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This zone board is a printed circuit board module used for zone management and control within TEL semiconductor equipment. It is responsible for coordinating the signal input and output, power control, sensor data aggregation, and other functions of one or more "zones" in the equipment. It is commonly used in multi cavity or multi unit systems.
The main functions include:
Manage control signals for specific areas (such as a cavity, heating unit, transmission path)
Integrated sensor input, actuator control, valve control, temperature or pressure feedback
Implement interface relay between the main control board, I/O board, and driver board
Provide localized power distribution and signal isolation to improve system stability and maintainability
2、 Typical application areas
1. Thin film deposition equipment such as CVD and ALD
Control heaters, MFCs (Mass Flow Controllers), vacuum valves, etc. inside specific chambers
Regional control of process parameters such as gas ratio, temperature distribution, pressure, etc
2. Plasma etching equipment (Etcher)
Provide high-frequency power interface, safety interlock, and sensor feedback channel for a certain area
Realize multi cavity collaborative work control
3. Wafer handling system (Loadlock/Transfer Arm area)
Control the lifting platform, vacuum pump, position sensor, door lock drive, etc
Realize precise signal transmission and logical judgment for inter regional linkage
4. Independent electrical control management of system submodules
Divide complex equipment into several "zones", with each zone board independently managing signals and controls within its own area
Support modular maintenance and replacement for quick diagnosis and repair
2.产 品 展 示
3.其他产品
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