TEL Tokyo Electron CT5085-430221-15旋转器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron CT5085-430221-15 旋转器
类别：机械旋转组件 / Rotator
制造商：Tokyo Electron Ltd.（TEL）
一、产品功能概述
该旋转器是一种用于半导体制造设备中的精密机械执行部件，主要负责：
精确控制晶圆或相关工件的旋转位置和速度
配合机械臂、传感器实现晶圆对位、搬运、翻转等动作
保障旋转过程的平稳性与重复定位精度
支持与驱动器和控制系统协同工作，实现闭环控制
二、典型应用领域
晶圆传输和装载系统
在 Loadport、Transfer Module 或 Robot 手臂中实现晶圆旋转
便于晶圆与设备接口的对准和放置
光刻与曝光设备
控制晶圆旋转，实现多角度曝光或对准
保证图案精准叠加与位置校正
刻蚀与沉积工艺设备
旋转晶圆以实现均匀刻蚀或沉积效果
控制旋转速度，保证工艺稳定性
检测与测试设备
旋转工件进行多角度检测或光学测量
三、产品技术特性
高精度旋转轴承，确保平滑无间隙旋转
支持多速率调节及可编程控制
结构紧凑，便于集成于设备狭小空间
兼容工业标准驱动接口，可与伺服电机等执行器配合使用
设计满足洁净室和高稳定性环境要求
英文资料：
TEL Tokyo Electron CT5085-430221-15 rotator
Category: Mechanical Rotating Components/Rotator
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This rotator is a precision mechanical actuator used in semiconductor manufacturing equipment, mainly responsible for:
Accurately control the rotational position and speed of wafers or related workpieces
Cooperate with robotic arms and sensors to achieve wafer alignment, handling, flipping, and other actions
Ensure the smoothness and repeated positioning accuracy of the rotation process
Support collaborative work with drivers and control systems to achieve closed-loop control
2、 Typical application areas
Wafer transfer and loading system
Realize wafer rotation in Loadport, Transfer Module, or Robot arm
Easy alignment and placement of wafer and equipment interfaces
Lithography and exposure equipment
Control wafer rotation to achieve multi angle exposure or alignment
Ensure precise pattern overlay and position correction
Etching and deposition process equipment
Rotate the wafer to achieve uniform etching or deposition effect
Control rotation speed to ensure process stability
Testing and Inspection Equipment
Rotating workpieces for multi angle detection or optical measurement
3、 Product Technical Characteristics
High precision rotating bearings ensure smooth and seamless rotation
Support multi rate regulation and programmable control
Compact structure, easy to integrate into narrow spaces of equipment
Compatible with industrial standard driver interfaces, can be used in conjunction with servo motors and other actuators
Design to meet the requirements of clean rooms and high stability environments
2.产 品 展 示
3.其他产品
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