TEL Tokyo Electron UPC-T0089A-11连接器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron UPC-T0089A-11 连接器模块
类别：连接器模块（Connector Module）
制造商：Tokyo Electron Ltd.（TEL）
一、产品功能概述
该连接器模块主要用于半导体制造设备中，实现设备内部各电子模块之间的可靠电气连接。其功能包括：
提供多针多通道的电信号和控制信号接口
连接主控板、接口板、传感器模块、驱动器等子模块
支持高速数据传输和低电阻电源连接
结构紧凑，方便模块化安装和快速拆装维护
二、典型应用领域
设备内部信号总线连接
作为各控制模块之间的标准接口，实现数据和控制信号的传递
气体流量控制与阀门驱动系统
连接质量流量控制器（MFC）与主控板，实现精确气体配比控制
机械臂与搬运模块
驱动机械手执行动作的电气接口，保障信号稳定与动作精确
真空腔体监控系统
连接传感器、阀门及监控单元，确保真空系统安全运行
三、产品特点
高密度、多针脚设计，支持复杂信号布线
工业级耐用设计，适应高洁净度和高稳定性要求
可靠的插拔结构，支持反复拆装
兼容TEL多种设备控制架构，便于系统集成和维护
英文资料：
TEL Tokyo Electron UPC-T0089A-11 connector module
Category: Connector Module
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This connector module is mainly used in semiconductor manufacturing equipment to achieve reliable electrical connections between various electronic modules inside the equipment. Its functions include:
Provide multi pin and multi-channel electrical and control signal interfaces
Connect sub modules such as the main control board, interface board, sensor module, driver, etc
Supports high-speed data transmission and low resistance power connection
Compact structure, convenient modular installation and quick disassembly and maintenance
2、 Typical application areas
Internal signal bus connection of the device
As a standard interface between various control modules, it enables the transmission of data and control signals
Gas flow control and valve drive system
Connect the Mass Flow Controller (MFC) to the main control board to achieve precise gas ratio control
Mechanical arm and handling module
The electrical interface that drives the robotic arm to perform actions ensures stable signals and precise movements
Vacuum chamber monitoring system
Connect sensors, valves, and monitoring units to ensure safe operation of the vacuum system
3、 Product Features
High density, multi pin design, supporting complex signal wiring
Industrial grade durable design, suitable for high cleanliness and stability requirements
Reliable plug-in structure, supporting repeated disassembly and assembly
Compatible with multiple TEL device control architectures, facilitating system integration and maintenance
2.产 品 展 示
3.其他产品
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