TEL Tokyo Electron 2L80-000212-13驱动器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 2L80-000212-13 驱动器模块
类型：执行单元控制驱动器（Driver Module / Actuator Driver）
制造商：Tokyo Electron Ltd.（TEL）
一、产品功能概述
2L80-000212-13 驱动器 是用于半导体设备中执行部件（如马达、电磁阀、线性执行器等）的控制模块。它主要执行以下功能：
接收主控制系统或嵌入式处理器发出的控制信号
放大控制信号以驱动高功率负载（如伺服电机、步进电机）
提供精确的速度控制、位置控制或力矩控制
实现闭环反馈控制，与传感器模块协同运行
具备电气保护功能，如过载、过压、过流保护
二、典型应用领域
1. 晶圆搬运系统（Wafer Transfer Module）
驱动真空机械手、旋转臂、Z轴升降平台等装置
实现晶圆精准搬运、对位、装载与卸载
2. 真空腔体动作控制系统
控制真空阀门的开关动作、定位机构或腔体门的驱动电机
支持多点定位与闭环反馈，提升腔体安全性和可靠性
3. 化学气相沉积（CVD）或刻蚀系统中的阀控驱动
驱动气体比例控制阀、电磁阀或切换阀
精准调节气体流量、配比与响应时序
4. 冷却或加热平台驱动装置
驱动热沉、冷板调节组件或风扇/液冷泵
保持腔体内温度均匀性与稳定性
英文资料：
TEL Tokyo Electron 2L80-000212-13 Driver Module
Type: Driver Module/Actor Driver
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
The 2L80-0000212-13 driver is a control module used for executing components in semiconductor equipment, such as motors, solenoid valves, linear actuators, etc. It mainly performs the following functions:
Receive control signals from the main control system or embedded processor
Amplify control signals to drive high-power loads (such as servo motors, stepper motors)
Provide precise speed control, position control, or torque control
Implement closed-loop feedback control and operate in conjunction with sensor modules
Equipped with electrical protection functions, such as overload, overvoltage, and overcurrent protection
2、 Typical application areas
1. Wafer Transfer Module
Drive vacuum manipulator, rotating arm, Z-axis lifting platform and other devices
Realize precise wafer handling, alignment, loading and unloading
2. Vacuum chamber action control system
Control the opening and closing actions of vacuum valves, positioning mechanisms, or drive motors for chamber doors
Support multi-point positioning and closed-loop feedback to enhance cavity safety and reliability
3. Valve controlled driving in chemical vapor deposition (CVD) or etching systems
Drive gas proportional control valve, solenoid valve or switching valve
Accurately adjust gas flow rate, ratio, and response timing
4. Cooling or heating platform drive device
Drive heat sink, cold plate adjustment components or fans/liquid cooling pumps
Maintain temperature uniformity and stability inside the cavity
2.产 品 展 示
3.其他产品
KOLLMORGEN PC834-001-T 无刷伺服驱动器
4.其他英文产品
Kollmorgen MMC-SD-0.5-230-D servo drive
YT204001-KA/5 voltage signal regulator
| 710-653699-20 | 8005-AN-108 | 710-809156-000 |
| 710-652697-20 | 8055-SCP-655X | 710-678525-00 |
| 710-652010-20 | 8055-SCP-655R | 531X310SNDAEG1 |
| 710-651090-20 | 8055-SCP-655 | 820-06553-000 |
| 710-650879-20 | 8055-SCP-654 | 4007-001-0089 |
| 710-650204-20 | 8055-SCP-453 | 710-650074-20 |
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