TEL Tokyo Electron 2L08-00005-12传感器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 2L08-00005-12 传感器模块
类型：传感器组件 / Sensor Module
制造商：Tokyo Electron Ltd.（TEL）
一、产品功能概述
该模块是 TEL 半导体设备中的一种 专用传感器接口或集成传感器单元，其作用通常为：
监测设备内部的某种关键物理参数（如温度、压力、流量、位置、电压等）
将模拟信号或数字信号反馈至主控系统进行实时调节或安全联锁
用于闭环控制系统，配合执行器精确调节设备运行状态
具备模块化封装，便于在特定腔体或系统模块内独立安装和替换
二、典型应用领域
1. 真空腔体管理系统（Etcher / CVD）
检测腔体内的气压、温度或气体流速
反馈数据用于调节真空泵、MFC（质量流量控制器）、加热器等设备
2. 晶圆传输系统（Wafer Handling / Load Port）
检测机械臂或升降平台的位置、速度、到位状态
确保晶圆搬运过程中动作精准无误
3. 液体或化学品供应系统（Wet Station / Cleaning）
检测液体温度、压力、流量等
保障清洗液稳定供应，避免干涸、过压或温控异常
4. 温控模块（Thermal Management）
实时监测加热平台、冷却板等装置的温度分布
配合PID控制器调整电流或流体循环系统
英文资料：
TEL Tokyo Electron 2L08-00005-12 Sensor Module
Type: Sensor Module
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This module is a dedicated sensor interface or integrated sensor unit in TEL semiconductor equipment, typically used for:
Monitor a key physical parameter inside the device (such as temperature, pressure, flow rate, position, voltage, etc.)
Feedback analog or digital signals to the main control system for real-time adjustment or safety interlocking
Used for closed-loop control systems, in conjunction with actuators to accurately adjust the operating status of equipment
Equipped with modular packaging, it is easy to independently install and replace within specific cavities or system modules
2、 Typical application areas
1. Vacuum chamber management system (Etcher/CVD)
Detect the pressure, temperature, or gas flow rate inside the chamber
Feedback data is used to adjust equipment such as vacuum pumps, MFCs (Mass Flow Controllers), heaters, etc
2. Wafer Handling/Load Port System
Detect the position, speed, and in place status of the robotic arm or lifting platform
Ensure precise and error free movements during wafer handling
3. Liquid or chemical supply system (Wet Station/Cleaning)
Detect liquid temperature, pressure, flow rate, etc
Ensure stable supply of cleaning solution, avoid drying up, overpressure or abnormal temperature control
4. Thermal Management Module
Real time monitoring of temperature distribution of heating platform, cooling plate and other devices
Adjust current or fluid circulation system in conjunction with PID controller
2.产 品 展 示
3.其他产品
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4.其他英文产品
ASEA 57360001-AN circuit board
LAM 810-800081-016 CPU motherb
Siemens 6ES7291-8GC00-0XA0 cartridge
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