TEL Tokyo Electron 808-520170-3印刷电路板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 808-520170-3 印刷电路板
类型：PCB 控制板 / Interface or Logic Circuit Board
制造商：Tokyo Electron Ltd.（TEL）
一、产品功能概述
该电路板是 TEL 半导体制造设备中的一个核心电子模块，通常用于以下目的：
作为 信号处理、逻辑控制或电源调节电路的承载平台
实现控制系统与执行单元之间的通信与数据交换
对输入/输出信号进行逻辑判断、缓冲、隔离或滤波
支持外部传感器、执行器或其他板卡之间的连接和协调控制
二、典型应用领域
1. 半导体刻蚀设备（Etching Systems）
控制等离子体发生器、真空腔体阀门、电源状态等
作为刻蚀系统的信号中转与判断逻辑核心
2. 薄膜沉积设备（CVD / ALD / PVD）
用于控制气体比例阀、加热器、压力传感器等关键组件
实现对温度、流量、压强的动态调节
3. 晶圆传输与装载系统（Wafer Handling）
控制搬运机械手、电机驱动、传感器反馈等
确保晶圆在工艺腔体之间准确、安全地转移
4. 系统主控单元中的辅助子板
为主CPU板、通信板等提供信号转换与接口桥接
支持数字量与模拟量输入/输出
5. 清洗与烘干系统（Wet Bench / Scrubber）
控制喷嘴、加热器、流量泵等运行逻辑
实现流程控制自动化
英文资料：
TEL Tokyo Electron 808-52170-3 Printed Circuit Board
Type: PCB Control Board/Interface or Logic Circuit Board
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This circuit board is a core electronic module in TEL semiconductor manufacturing equipment, typically used for the following purposes:
As a carrier platform for signal processing, logic control, or power regulation circuits
Implement communication and data exchange between the control system and the execution unit
Logical judgment, buffering, isolation, or filtering of input/output signals
Support connection and coordinated control between external sensors, actuators, or other boards
2、 Typical application areas
1. Semiconductor Etching Systems
Control the plasma generator, vacuum chamber valves, power status, etc
As the signal relay and judgment logic core of the etching system
2. Thin film deposition equipment (CVD/ALD/PVD)
Used to control key components such as gas proportional valves, heaters, pressure sensors, etc
Realize dynamic adjustment of temperature, flow rate, and pressure
3. Wafer Handling System
Control the handling robot arm, motor drive, sensor feedback, etc
Ensure accurate and safe transfer of wafers between process chambers
4. Auxiliary daughter board in the main control unit of the system
Provide signal conversion and interface bridging for main CPU board, communication board, etc
Support digital and analog input/output
5. Cleaning and Drying System (Wet Bench/Scrubber)
Control the operating logic of nozzles, heaters, flow pumps, etc
Realize process control automation
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA 57360001-HG Circuit Board
AMAT 0190-66253 Communication Module
| 710-805314-00 | 8020-SCP-423 | X-DO 32 51 |
| 710-805000-50 | 8020-SCP-401 | X-DO 32 01 |
| 710-800667 | 8020-SCP-333 | X-CI 24 51 |
| 710-774063-001 | 8020-SCP-332 | X-DI 32 04 |
| 710-679375-00 | 8020-SCP-323 | X-DI 32 03 |
| 710-678545-00 | 8020-SCP-322 | X-DI 32 02 |
| 710-678525-001 | 8020-SCP-321 | X-DI 32 01 |
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