TEL Tokyo Electron 3D81-000040-V2处理器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3D81-000040-V2 处理器模块
产品类型：控制处理模块 / Processor Board
制造商：Tokyo Electron Ltd.（TEL）
一、产品功能简介
该模块是用于 TEL 半导体设备中的 嵌入式控制核心部件，承担设备运行中的数据处理、逻辑控制与系统协调等关键功能。其主要职责包括：
管理和控制设备的运行逻辑、动作流程
实时采集传感器数据并做出逻辑判断
启动、停止和调度设备子模块（如加热器、阀门、真空泵、机械臂等）
作为主控CPU板或嵌入式系统核心，运行嵌入式操作系统或定制固件
支持与HMI（人机界面）或远程监控系统的数据通信
二、典型应用领域
1. 晶圆刻蚀设备（Etching Systems）
控制真空腔内的等离子体生成、电源调节、刻蚀时间与气体流量等
实现工艺参数的精准控制与反馈调整
2. 化学气相沉积系统（CVD / ALD）
管理沉积温度、气体比例、反应时间等关键变量
确保沉积厚度和均匀性满足工艺要求
3. 晶圆传输模块（Wafer Handling Systems）
控制机械手、轨道、电梯、Loadlock门等动作
实现高效、高精度的晶圆搬运与对接
4. 光刻与清洗设备
在光刻设备中负责光源控制、曝光对准、调焦等动作控制
在清洗系统中控制喷头、流体压力、电机运转等执行单元
英文资料：
TEL Tokyo Electron 3D81-000040-V2 processor module
Product Type: Control Processing Module/Processor Board
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Introduction
This module is an embedded control core component used in TEL semiconductor equipment, responsible for key functions such as data processing, logic control, and system coordination during equipment operation. Its main responsibilities include:
Manage and control the operational logic and action flow of equipment
Real time collection of sensor data and making logical judgments
Start, stop, and schedule equipment submodules (such as heaters, valves, vacuum pumps, robotic arms, etc.)
As the main control CPU board or embedded system core, running embedded operating systems or customized firmware
Support data communication with HMI (Human Machine Interface) or remote monitoring system
2、 Typical application areas
1. Etching Systems for wafer etching equipment
Control plasma generation, power regulation, etching time, and gas flow rate inside the vacuum chamber
Realize precise control and feedback adjustment of process parameters
2. Chemical vapor deposition system (CVD/ALD)
Manage key variables such as sedimentation temperature, gas ratio, reaction time, etc
Ensure that the sedimentation thickness and uniformity meet the process requirements
3. Wafer Handling Systems
Control the actions of robotic arms, tracks, elevators, Loadlock doors, etc
Realize efficient and high-precision wafer handling and docking
4. Lithography and cleaning equipment
Responsible for controlling actions such as light source control, exposure alignment, and focusing in lithography equipment
Control the execution units such as nozzles, fluid pressure, and motor operation in the cleaning system
2.产 品 展 示
3.其他产品
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| 735-5-5-LO-485 | 8030-RIM-25 | X-FTA 002 02L 02R |
| 735-5-5-HI-485 | 8030-RIM-144 | X-FTA 002 01L 01R |
| 735-5-5-125-485-DEMO | 8030-RIM-143 | X-FTA 001 02L |
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| 735-5-1-HI-485 | 8030-ROM-141 | X-MIO 7/6 01 |
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