TEL Tokyo Electron 3208-000089-12连接器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3208-000089-12 连接器模块
产品类型：Connector Module / 接口连接模块
制造商：Tokyo Electron Ltd.（TEL）
一、产品功能简介
该连接器模块通常作为 信号、电源或控制系统之间的物理和电气连接接口，在 TEL 半导体设备内部用于：
连接主控电路板与子系统模块（如阀控单元、加热单元、传感器阵列）
提供稳定的多针或多线电气连接
支持高速、低干扰的数据与控制信号传输
快速插拔式设计，便于维护与更换
二、典型应用领域
1. 气体输送与质量流量控制系统（MFC）
将质量流量控制器、电磁阀、压力传感器与主控板连接
实现气体控制回路的精确通信
2. 真空腔体控制系统
在等离子体刻蚀设备、CVD系统中连接腔体传感器、门阀、泵控制器等模块
提供屏蔽接口、确保信号不受干扰
3. 晶圆处理模块（Loadlock、Transfer）
连接温控平台、马达、位置检测传感器等元件
实现多轴精密控制及反馈
4. 电源与信号管理系统
用于电源分配板与控制系统之间的信号电缆对接
支持高电流低阻抗连接，保障供电稳定
5. I/O接口平台
集中管理来自多个子系统的 I/O 信号，并接入主控制系统或 PLC
在故障或维护时可实现模块化快速更换
英文资料：
TEL Tokyo Electron 3208-000089-12 connector module
Product Type: Connector Module/Interface Connection Module
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Introduction
This connector module is typically used as a physical and electrical connection interface between signal, power, or control systems, and is used within TEL semiconductor equipment for:
Connect the main control circuit board with subsystem modules (such as valve control unit, heating unit, sensor array)
Provide stable multi pin or multi wire electrical connections
Support high-speed and low interference data and control signal transmission
Quick plug-in design, easy to maintain and replace
2、 Typical application areas
1. Gas delivery and mass flow control system (MFC)
Connect the mass flow controller, solenoid valve, pressure sensor to the main control board
Realize precise communication of gas control circuit
2. Vacuum chamber control system
Connecting modules such as cavity sensors, gate valves, pump controllers, etc. in plasma etching equipment and CVD systems
Provide shielding interfaces to ensure that signals are not interfered with
3. Wafer processing modules (Loadlock, Transfer)
Connect components such as temperature control platform, motor, position detection sensor, etc
Realize multi axis precision control and feedback
4. Power and signal management system
Used for signal cable docking between power distribution board and control system
Support high current and low impedance connections to ensure stable power supply
5. I/O interface platform
Centralize the management of I/O signals from multiple subsystems and connect them to the main control system or PLC
Modular and rapid replacement can be achieved during faults or maintenance
2.产 品 展 示
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