TEL Tokyo Electron LSC-6230-S3-11 液体源控制器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：
TEL Tokyo Electron LSC-6230-S3-11 液体源控制器
产品概述：
LSC-6230-S3-11 是由 Tokyo Electron（TEL）使用并由 STEC 生产的一款液体源控制器，主要用于半导体制造设备中液态化学品的气化和供应控制。它属于 TEL Alpha 系列或其他前道工艺设备（如化学气相沉积系统）中液体源模块的重要组成部分。
应用领域：
1. 半导体薄膜沉积设备（CVD、MOCVD）
LSC-6230-S3-11 用于控制液态前驱物（如 TEOS、TDMAT、TMP）通过加热气化后输送至反应腔体中，是化学气相沉积（CVD）或金属有机 CVD（MOCVD）设备的核心部件之一。
2. 液体前驱物精密供应
此控制器具备多通道温控与流量控制功能，支持对微量液体的高精度稳定输出，适用于对工艺一致性要求极高的半导体生产流程。
3. 液体气化与输送系统配套
LSC-6230-S3-11 常与液体气化器、恒温加热器、泵浦、质量流量控制器等组成完整液体源系统，共同保障化学品在传输过程中的气化效率和输送稳定性。
4. 自动化系统控制集成
该控制器支持与上位机系统（如主控计算机、PLC）通信，可响应生产流程控制信号，实现与工艺步骤同步运行，广泛用于高自动化程度的设备平台中。
5. 设备模块替换与维护场景
在设备老化或故障维护过程中，该控制器常作为替换件用于 TEL 原装设备的恢复与扩展，特别是在 Alpha 8S、Trias、Unity 等设备中具有良好兼容性。
英文资料：
Product Name:
TEL Tokyo Electron LSC-6230-S3-11 Liquid Source Controller
Product Overview:
LSC-6230-S3-11 is a liquid source controller used by Tokyo Electron (TEL) and produced by STEC, mainly used for gasification and supply control of liquid chemicals in semiconductor manufacturing equipment. It is an important component of the liquid source module in TEL Alpha series or other front-end process equipment (such as chemical vapor deposition systems).
Application areas:
1. Semiconductor thin film deposition equipment (CVD, MOCVD)
LSC-6230-S3-11 is used to control the transportation of liquid precursors (such as TEOS, TDMAT, TMP) to the reaction chamber after heating and gasification. It is one of the core components of chemical vapor deposition (CVD) or metal organic CVD (MOCVD) equipment.
2. Precise supply of liquid precursors
This controller has multi-channel temperature control and flow control functions, supports high-precision and stable output of trace liquids, and is suitable for semiconductor production processes that require extremely high process consistency.
3. Liquid gasification and transportation system matching
LSC-6230-S3-11 is often combined with liquid vaporizers, constant temperature heaters, pumps, mass flow controllers, and other components to form a complete liquid source system, jointly ensuring the gasification efficiency and transportation stability of chemicals during transportation.
4. Automation system control integration
This controller supports communication with upper computer systems (such as main control computers and PLCs), can respond to production process control signals, and achieve synchronous operation with process steps. It is widely used in highly automated equipment platforms.
5. Equipment module replacement and maintenance scenarios
During the aging or maintenance process of equipment, this controller is often used as a replacement for the recovery and expansion of TEL original equipment, especially with good compatibility in devices such as Alpha 8S, Trias, Unity, etc.
2.产 品 展 示
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