TEL Tokyo Electron 3M80-001582-14电路板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：
TEL Tokyo Electron 3M80-001582-14 电路板
产品应用领域：
半导体制造设备控制系统
该电路板常作为控制系统中的 I/O 接口模块，广泛应用于 Tokyo Electron 的 Trias 系列设备中，包括 CVD（化学气相沉积）和 ALD（原子层沉积）等制程设备，用于协调控制器与工艺腔体之间的信号交互。多通道输入输出接口管理
用于连接传感器、执行器、气阀、温度控制器、电磁控制模块等现场设备，实现信号的采集与分发，支持闭环控制与状态反馈。设备工艺模块协同控制
可在与主控单元协作下，实现对关键工艺参数（如温度、气压、气体流量等）的精密调控，有助于提升制程一致性与产线良率。模块化系统集成应用
作为 SW300B/AIO2 控制单元的一部分，3M80-001582-14 电路板支持模块化结构，便于设备的快速部署、替换及升级，提升维护效率与系统扩展能力。设备运维与远程诊断支持
能够提供设备运行数据采集功能，为故障定位、预警机制和远程运维提供接口支撑，提升设备运转的可靠性与可视性。复杂工艺设备的数据通信中枢
在高度自动化的半导体制造设备中，它起着信号协调中枢的作用，确保来自不同子系统的数据能同步、高效、安全地传输和响应。
英文资料：
Product Name:
TEL Tokyo Electron 3M80-001582-14 Circuit Board
Product application areas:
Semiconductor manufacturing equipment control system
This circuit board is commonly used as an I/O interface module in control systems and is widely used in Tokyo Electron's Trias series equipment, including CVD (chemical vapor deposition) and ALD (atomic layer deposition) process equipment, to coordinate signal interaction between controllers and process chambers.
Multi channel input/output interface management
Used to connect field devices such as sensors, actuators, air valves, temperature controllers, electromagnetic control modules, etc., to achieve signal acquisition and distribution, support closed-loop control and status feedback.
Collaborative control of equipment process modules
By collaborating with the main control unit, precise control of key process parameters such as temperature, pressure, gas flow rate, etc. can be achieved, which helps to improve process consistency and production line yield.
Modular system integration application
As part of the SW300B/AIO2 control unit, the 3M80-001582-14 circuit board supports a modular structure, which facilitates rapid deployment, replacement, and upgrade of equipment, improving maintenance efficiency and system scalability.
Equipment operation and remote diagnostic support
It can provide equipment operation data collection function, provide interface support for fault location, warning mechanism and remote operation and maintenance, and enhance the reliability and visibility of equipment operation.
The data communication center of complex process equipment
In highly automated semiconductor manufacturing equipment, it plays the role of a signal coordination hub, ensuring that data from different subsystems can be transmitted and responded to synchronously, efficiently, and securely.
2.产 品 展 示
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