TEL Tokyo Electron ES1D80-001291-13电源供应器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称
TEL Tokyo Electron ES1D80-001291-13 电源供应器
（对应 OEM 原厂型号：Sanken MLT-DCB0X5 / DCBOX5）
主要功能
这是一款多路直流输出电源模块，为TEL半导体设备内部各类电控系统提供稳定的电源支持，支持多种电压轨输出，广泛用于高精度控制和驱动电路中。
典型技术参数（参考值）
输入电压：90–110 VAC，约6.5 A
输出电压通道：
+5V / 10A
+15V / 1.7A
–15V / 2A
+24V / 4.1A
+12V / 3A
这些输出用于为控制板、信号板、执行单元等提供所需不同电压等级。
产品应用领域
1. 等离子蚀刻设备供电系统
广泛应用于TEL的等离子蚀刻设备（如 Unity II U2-855DD 系列）中，为控制系统、RF模块、真空接口、腔体控制等关键组件提供多路电源。
2. 设备控制板与VME总线系统供电
为设备中控制主板、输入输出模块（I/O）、接口板、逻辑处理单元等多个子系统提供各自所需电压，满足复杂电路同时供电的需求。
3. 传感器与执行器模块驱动
用于为各类精密传感器、阀门控制器、伺服单元、电磁驱动器等模块供电，确保工艺控制的实时性和精确性。
4. 工艺控制系统与安全监测供电
为与温度、气压、真空、流量控制相关的模块提供稳定电源，支持对设备运行状态的实时监测和控制。
5. 设备维护与模块替换兼容性强
其模块化、多电压输出设计，便于设备在故障更换、升级扩展中快速对接，减少系统停机时间，提高维护效率。
英文资料：
product name
TEL Tokyo Electron ES1D80-001291-13 Power Supply Unit
(Corresponding OEM original model: Sanken MLT-DCB0X5/DCBOX5)
major function
This is a multi-channel DC output power module that provides stable power support for various electronic control systems inside TEL semiconductor equipment. It supports multiple voltage rail outputs and is widely used in high-precision control and drive circuits.
Typical technical parameters (reference values)
Input voltage: 90-110 VAC, approximately 6.5 A
Output voltage channel:
+5V / 10A
+15V / 1.7A
–15V / 2A
+24V / 4.1A
+12V / 3A
These outputs are used to provide different voltage levels required for control boards, signal boards, execution units, etc.
Product application areas
1. Power supply system for plasma etching equipment
Widely used in TEL's plasma etching equipment (such as the Unity II U2-855DD series), it provides multiple power sources for key components such as control systems, RF modules, vacuum interfaces, and chamber control.
2. Power supply for equipment control board and VME bus system
To provide the required voltage for multiple subsystems such as the control motherboard, input/output module (I/O), interface board, and logic processing unit in the device, meeting the simultaneous power supply needs of complex circuits.
3. Sensor and actuator module drivers
Used to supply power to various precision sensors, valve controllers, servo units, electromagnetic drivers, and other modules, ensuring real-time and accurate process control.
4. Process control system and safety monitoring power supply
Provide stable power supply for modules related to temperature, air pressure, vacuum, and flow control, and support real-time monitoring and control of equipment operating status.
5. Strong compatibility between equipment maintenance and module replacement
Its modular and multi voltage output design facilitates rapid integration of equipment during fault replacement, upgrade, and expansion, reducing system downtime and improving maintenance efficiency.
2.产 品 展 示
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