TEL Tokyo Electron 381-642277-4限制板 PDF资料
1.产 品 资 料 介 绍:
中文资料:
TEL Tokyo Electron 381-642277-4 限制板
产品类别:限制板 / 接口板(tVME-UIO/BS)
所属系统:多用于 VME 总线架构的半导体设备控制系统中
典型设备:光刻机、刻蚀机、CVD/PVD 薄膜沉积设备、晶圆清洗系统等
产品应用领域详解:
1. 半导体设备控制模块的接口管理
该限制板作为接口通道板,用于控制器(如主CPU或处理器板)与各种执行器、传感器之间的数据和控制信号连接,是设备逻辑控制链条中的桥梁。
2. I/O 接口扩展与集成
在VME总线架构中,381-642277-4限制板用于扩展多个I/O信号通道。它可集成多种接口信号(模拟量、开关量等),确保系统具备灵活、可扩展的信号处理能力。
3. 自动化工艺控制
广泛用于半导体制程中的气体流量、温控、真空腔压等工艺参数的精密控制,作为自动化工艺单元中的标准接口设备。
4. 设备间通信协调
用于不同子系统间的数据同步和命令传输,例如主控板与各功能模块(阀门控制、加热单元、电机驱动等)之间的通信桥梁。
5. 系统维护与故障定位支持
由于模块化设计,该限制板在设备维护时便于快速更换。它还能协助定位信号异常或通信中断等故障,提高设备可维护性。
6. 抗干扰与工业稳定性
该限制板为工业级设计,具备高抗电磁干扰能力,适合在半导体设备严苛的运行环境中长期工作,确保设备运行稳定性。
英文资料:
TEL Tokyo Electron 381-642277-4 restriction board
Product Category: Restrictive Board/Interface Board (tTME-UIO/BS)
System: Commonly used in semiconductor equipment control systems with VME bus architecture
Typical equipment: lithography machine, etching machine, CVD/PVD thin film deposition equipment, wafer cleaning system, etc
Detailed explanation of product application areas:
1. Interface management of semiconductor equipment control module
This restriction board serves as an interface channel board for connecting data and control signals between controllers (such as main CPU or processor boards) and various actuators and sensors, and is a bridge in the device logic control chain.
2. I/O interface expansion and integration
In the VME bus architecture, the 381-642277-4 restriction board is used to expand multiple I/O signal channels. It can integrate multiple interface signals (analog, switch, etc.) to ensure that the system has flexible and scalable signal processing capabilities.
3. Automated process control
Widely used for precise control of process parameters such as gas flow rate, temperature control, and vacuum chamber pressure in semiconductor processes, as a standard interface device in automated process units.
4. Communication and coordination between devices
Used for data synchronization and command transmission between different subsystems, such as the communication bridge between the main control board and various functional modules (valve control, heating unit, motor drive, etc.).
5. System maintenance and fault location support
Due to its modular design, this restriction board is easy to replace quickly during equipment maintenance. It can also assist in locating faults such as signal abnormalities or communication interruptions, improving equipment maintainability.
6. Anti interference and industrial stability
This restriction board is designed for industrial use and has high resistance to electromagnetic interference. It is suitable for long-term operation in the harsh operating environment of semiconductor equipment, ensuring the stability of equipment operation.
2.产 品 展 示
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