TEL Tokyo Electron 3D81-000071-V1控制器板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3D81-000071-V1 控制器板简介
产品型号：3D81-000071-V1（型号名称 PF-DB LM CONT）
主要功能：
作为半导体制造设备中的核心控制器板，负责设备内部模块间的信号交换与数据通信。
保障设备运行的协调性与稳定性。
应用领域：
半导体晶圆加工设备控制系统
自动化生产线中各功能模块间的数据和指令传输
设备工艺控制和监控，支持实时数据采集和设备状态监测
设备的诊断与维护，支持远程监控和维护操作
产品状态与兼容性：
多为二手原装件，经过测试确保良好工作状态
兼容TEL Tokyo Electron多种设备型号
英文资料：
Introduction to TEL Tokyo Electron 3D81-000071-V1 Controller Board
Product model: 3D81-000071-V1 (model name PF-DB LM CONT)
Main functions:
As the core controller board in semiconductor manufacturing equipment, it is responsible for signal exchange and data communication between internal modules of the equipment.
Ensure the coordination and stability of equipment operation.
Application areas:
Semiconductor wafer processing equipment control system
Data and instruction transmission between various functional modules in automated production lines
Equipment process control and monitoring, supporting real-time data collection and equipment status monitoring
Diagnosis and maintenance of equipment, supporting remote monitoring and maintenance operations
Product status and compatibility:
Mostly second-hand original parts, tested to ensure good working condition
Compatible with multiple TEL Tokyo Electron device models
2.产 品 展 示
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| IC3600LTDA1C | 531X186CPSAGG1 | IC3600EPSH1B1 |
| IC3600LTDA1A | 531X186CPSAFG1 | IC3600EPSH1B |
| IC3600LTDA1 | 531X1860CPSAHG1 | IC3600EPSH1 |
| IC3600LSSA1 | 531X185CPTAMG1 | IC3600EPSE2 |
| IC3600LSRM1 | 531X185CPTALG1 | IC3600EPSE1D1B |
| IC3600LSRD1 | 531X185CPTAKG1 | IC3600EPSD1C1B |
| IC3600LSRB1A | 531X184IPTAFG1 | IC3600EPSC1B |
| IC3600LSRB1 | 531X184IPTAEG1 | IC3600EPSC1 |
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