TEL Tokyo Electron 1B80-002390-11阀门区域板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1B80-002390-11 阀门区域板 — 产品应用领域
气体流路管理与分配
该阀门区域板用于精确控制半导体设备内部各个工艺区域的气体流向和分配，确保工艺气体按照要求稳定供应。区域阀门控制
负责设备中多个区域阀门的开关及调节，控制气体流量和压力，维持工艺条件的稳定。自动化系统集成
作为设备自动化控制系统的重要组成部分，与主控制系统协同，实现多区域阀门的集中管理与监控。故障监测与安全联锁
实时监测阀门状态和气体流路异常，出现异常时触发报警和安全联锁，保障设备与人员安全。模块化设计便于维护
采用模块化结构，便于设备维护时快速更换或升级，提高设备的可维护性和可靠性。
英文资料：
TEL Tokyo Electron 1B80-002390-11 Valve Area Plate - Product Application Fields
Gas flow path management and distribution
This valve area board is used to precisely control the gas flow and distribution in various process areas inside semiconductor equipment, ensuring stable supply of process gases as required.
Regional valve control
Responsible for opening and adjusting valves in multiple areas of the equipment, controlling gas flow and pressure, and maintaining stable process conditions.
Automation system integration
As an important component of the equipment automation control system, it collaborates with the main control system to achieve centralized management and monitoring of multi zone valves.
Fault monitoring and safety interlocking
Real time monitoring of valve status and gas flow path abnormalities, triggering alarms and safety interlocks when abnormalities occur to ensure equipment and personnel safety.
Modular design facilitates maintenance
Adopting a modular structure facilitates quick replacement or upgrade during equipment maintenance, improving the maintainability and reliability of the equipment.
2.产 品 展 示
3.其他产品
4.其他英文产品
GE IS210BPPBH2BMD Controller Module
KOLLMORGEN CP310250 PRD-P310250Z-55 serv
| IC3600SCBN1B | 531X300CCHADM5 | IC3600SSKB1 |
| IC3600SCBN1 | 531X300CCHADM3 | IC3600SSKA1G1C |
| IC3600SCBM2 | 531X300CCHADM2 | IC3600SSKA1F |
| IC3600SCBL1 | 531X300CCHADM1 | IC3600SSKA1 |
| IC3600SCBK1 | 531X300CCHACM1 | IC3600SSIB1 |
| IC3600SCBH1 | 531X300CCHABM5 | IC3600SSIA1 |
| IC3600SCBE1A | 531X300CCHAAM5 | IC3600SSFG1B1B |
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