TEL Tokyo Electron 3381-000113-12照明控制板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
1. 工艺腔体照明控制
此控制板用于半导体设备内部（如曝光机、刻蚀设备或涂胶显影机）腔体或工作台的照明管理。
控制光源亮度、开关和光照质量，确保工艺人员在维护、检修或视觉检测时有可靠照明条件。
2. 视觉检测与校准支持
在设备启动前或维护时，通过标准化照明提供均匀光照，配合CCD摄像系统执行光学检测、定位校准和故障检查。
帮助提高视觉检测系统的准确性和重复性，加强工艺控制。
3. 自动化操作状态可视化
板卡可根据设备不同工作状态（待机、运行、故障等）调整照明亮度或工作模式，帮助操作人员快速识别设备状态。
4. 安全警示与状态指示
可通过控制不同颜色或闪烁模式的光源，作为设备故障或警报状态时的视觉提示，为快速响应提供辅助。
5. 能源优化与可靠性提升
控制LED或氙灯等照明元件的功率输出，实现高效、稳定、长寿命的照明配置。
确保设备在千万级洁净室环境下不会因灯具故障而影响制程或增添维护难度。
英文资料：
1. Lighting control of process chamber
This control board is used for lighting management of chambers or workbenches inside semiconductor equipment, such as exposure machines, etching equipment, or coating and developing machines.
Control the brightness, switch, and lighting quality of the light source to ensure reliable lighting conditions for process personnel during maintenance, repair, or visual inspection.
2. Visual inspection and calibration support
Before starting or maintaining the equipment, provide uniform illumination through standardized lighting, and cooperate with CCD camera system to perform optical detection, positioning calibration, and fault inspection.
Help improve the accuracy and repeatability of visual inspection systems, and strengthen process control.
3. Visualization of automation operation status
The board can adjust the lighting brightness or working mode according to different working states of the device (standby, running, fault, etc.), helping operators quickly identify the device status.
4. Safety warning and status indication
By controlling light sources of different colors or flashing patterns, it can serve as a visual indication in case of equipment failure or alarm status, providing assistance for rapid response.
5. Energy optimization and reliability improvement
Control the power output of lighting components such as LED or xenon lamps to achieve efficient, stable, and long-lasting lighting configurations.
Ensure that the equipment does not affect the process or increase maintenance difficulty due to lighting failures in a cleanroom environment with millions of units.
2.产 品 展 示
3.其他产品
ABB REG670 1MRK002826-AC 安全系统组件
4.其他英文产品
ABB CHBX01R 2VAA008575R1 redundant modul
Schneider 140CP43412A Controller Module
Schneider 140CPS11100 Analog Input Modul
| IC3600SHCV1B | 6DD1682-0CH2 | IC3600SSZB1K |
| IC3600SHCN3C | 6DD1682-0CH1 | IC3600SSZB1C |
| IC3600SGDF1 | 6DD1682-0CH0 | IC3600SSZB1 |
| IC3600SGDE1 | 6DD1682-0CG0 | IC3600SSZA1 |
| IC3600SGDD1A1 | 6DD1682-0CF0 | IC3600SSVJ1 |
| IC3600SGDD1 | 6DD1682-0CE4 | IC3600SSVG1 |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs
