TEL Tokyo Electron 1181-000828-12电机分配板 PDF资料
1.产 品 资 料 介 绍:
中文资料:
TEL Tokyo Electron 1181-000828-12 电机分配板 – 产品应用领域
1. 多电机控制与分配
该分配板用于管理多个电机的电源与控制信号,实现对设备中多个运动部件(如泵、风机、滑台、旋转电机等)的统一调度与分配控制。
2. 半导体设备驱动系统
广泛应用于TEL的涂胶显影机、清洗设备、刻蚀机等中,作为电机驱动系统的核心控制接口,用于连接并分配来自主控单元(如控制器或驱动器)的控制信号。
3. 自动化控制系统接口
作为设备自动化系统中的一部分,该板卡支持接收上位机或PLC发出的指令,并将其按电机通道分发执行,同时将电机运行状态反馈至主控系统。
4. 故障检测与联锁控制
具备对各电机运行状态的实时监测能力,可对过载、断线、过温等情况进行反馈,并触发故障联锁或报警机制,保障系统稳定运行。
5. 设备维护与模块替换
采用标准化模块化设计,可用于设备维保和快速更换,提高维护效率,减少设备停机时间,是半导体制造设备中的重要备件之一。
英文资料:
TEL Tokyo Electron 1181-000828-12 Motor Distribution Board - Product Application Fields
1. Multi motor control and distribution
This distribution board is used to manage the power and control signals of multiple motors, achieving unified scheduling and distribution control of multiple moving parts in the equipment (such as pumps, fans, slide tables, rotating motors, etc.).
2. Semiconductor equipment driver system
Widely used in TEL's coating and developing machines, cleaning equipment, etching machines, etc., as the core control interface of the motor drive system, it is used to connect and distribute control signals from the main control unit (such as controller or driver).
3. Interface of automation control system
As a part of the equipment automation system, this board supports receiving instructions from the upper computer or PLC, distributing and executing them according to the motor channel, and feeding back the motor operating status to the main control system.
4. Fault detection and interlocking control
Capable of real-time monitoring of the operating status of each motor, providing feedback on overload, disconnection, overheating, and triggering fault interlocking or alarm mechanisms to ensure stable system operation.
5. Equipment maintenance and module replacement
Adopting standardized modular design, it can be used for equipment maintenance and rapid replacement, improving maintenance efficiency and reducing equipment downtime. It is one of the important spare parts in semiconductor manufacturing equipment.
2.产 品 展 示
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