TEL Tokyo Electron 3D81-000065-V1 控制器 PDF资料 

1.产 品 资 料 介 绍：

中文资料：

TEL Tokyo Electron 3D81-000065-V1 控制器模块 – 产品应用领域

1. 半导体刻蚀设备控制系统
该控制器模块主要用于 TEL 的 T-3044SS 等刻蚀设备，承担整机系统中功率供应与控制功能，确保等离子体刻蚀等关键工艺过程的稳定运行。

2. 功率供应与管理（Power Supply Control）
作为“PS Controller”，该模块负责管理设备多个部件（如射频电源、阀门、气体控制单元等）的供电，精确调节功率以满足不同工艺步骤的要求。

3. 通讯与接口集成
本模块还起接口板作用，用于主控系统与外围模块之间的数据通讯，支持信号同步、数据采集与响应控制，是系统联动运行的关键接口。

4. 故障检测与保护机制
具备基本的功率监控和异常检测功能，可实时监控输出状态，并在电压、电流异常时发出报警或自动断开，保障设备安全运行。

5. 设备维护与替换应用
在设备维护、老化部件更换或系统升级过程中，该模块可作为标准替换件，快速恢复设备功能，是TEL设备现场维护的常用备件之一。

英文资料：

TEL Tokyo Electron 3D81-000065-V1 Controller Module - Product Application Fields

1. Control system for semiconductor etching equipment

This controller module is mainly used for etching equipment such as TEL's T-3044SS, responsible for power supply and control functions in the entire system, ensuring the stable operation of key processes such as plasma etching.

2. Power Supply Control

As a "PS Controller", this module is responsible for managing the power supply of multiple components of the device (such as RF power supply, valves, gas control units, etc.), accurately adjusting power to meet the requirements of different process steps.

3. Communication and interface integration

This module also serves as an interface board for data communication between the main control system and peripheral modules, supporting signal synchronization, data acquisition, and response control. It is a key interface for system linkage operation.

4. Fault detection and protection mechanism

Equipped with basic power monitoring and anomaly detection functions, it can monitor the output status in real time and issue alarms or automatically disconnect when voltage and current are abnormal, ensuring the safe operation of the equipment.

5. Equipment maintenance and replacement applications

During equipment maintenance, replacement of aging components, or system upgrades, this module can be used as a standard replacement to quickly restore equipment functionality and is one of the commonly used spare parts for on-site maintenance of TEL equipment.

2.产      品      展      示      

3.其他产品

ABB XXD129A01 卡式模块控制器

GE IS215UCVEH2AE 数字量扩展模块

ABB LD800HSE 总线模块

4.其他英文产品

Kollmorgen MMC-SD-0.5-230-D servo drive

REXROTH PPC-R22.1N-T-NN-P1-NN-FW servo

DELTA TAU ACC-24E2 interface simulation

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：TEL Tokyo Electron  

型号：3D81-000065-V1 控制器

质保：一年

成色：全新/二手

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

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