TEL Tokyo Electron 3D81-000037-11传感器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Tokyo Electron（TEL）型号3D81-000037-11传感器模块，通常用于半导体制造设备中的传感和检测功能。以下是该传感器模块的典型产品应用领域总结：
TEL Tokyo Electron 3D81-000037-11传感器模块 产品应用领域
半导体制造设备
应用于TEL的各种晶圆加工设备中，如刻蚀机（Etcher）、薄膜沉积设备（CVD/PVD）、清洗机等。
传感器模块用于实时监测工艺参数，确保设备状态稳定，提升加工精度和良率。
设备自动化与控制
作为关键的传感输入设备，配合控制系统实现设备自动化控制。
监测温度、压力、位置、流量等关键工艺参数，确保设备运行符合设定标准。
工艺安全保护
通过传感器模块监测异常状态，实现报警和安全联锁，防止设备故障和工艺偏差造成损失。
提高设备运行安全性，防止意外停机。
设备维护与诊断
传感器数据用于设备健康监测和预防性维护，减少设备停机时间。
支持远程监控和故障诊断，提升维护效率。
清洁室环境监测
在洁净室环境中，传感器模块用于监测气体、湿度、颗粒物等环境参数，保证生产环境符合规范。
英文资料：
The Tokyo Electron (TEL) model 3D81-000037-11 sensor module is commonly used for sensing and detection functions in semiconductor manufacturing equipment. The following is a summary of typical product application areas for this sensor module:
TEL Tokyo Electron 3D81-000037-11 Sensor Module Product Application Fields
Semiconductor Manufacturing Equipment
Applied in various wafer processing equipment of TEL, such as Etcher, CVD/PVD, cleaning machine, etc.
The sensor module is used for real-time monitoring of process parameters, ensuring stable equipment status, and improving machining accuracy and yield.
Equipment Automation and Control
As a key sensing input device, it cooperates with the control system to achieve automated control of the equipment.
Monitor key process parameters such as temperature, pressure, position, and flow rate to ensure that equipment operation meets set standards.
Process safety protection
By monitoring abnormal states through sensor modules, alarms and safety interlocks are implemented to prevent losses caused by equipment failures and process deviations.
Improve the safety of equipment operation and prevent unexpected shutdowns.
Equipment maintenance and diagnosis
Sensor data is used for equipment health monitoring and preventive maintenance, reducing equipment downtime.
Support remote monitoring and fault diagnosis to improve maintenance efficiency.
Cleanroom environmental monitoring
In a clean room environment, sensor modules are used to monitor environmental parameters such as gas, humidity, and particulate matter to ensure that the production environment meets specifications.
2.产 品 展 示
3.其他产品
4.其他英文产品
ABB UN0807C-P Programmable Controller
HE700GEN200 Network Interface Module
| K32HCHJ-LNK-NS-01 | STM1800CV | IPSYS01 |
| K32HCHJ-LNK-NS-00 | SS2000MD4-M | IMCPM01 |
| K32HCHJ-LEK-PF-01 | P50-001 | IEPAS01 |
| K32HCHJ-LEK-M2-01 | 6SC6101-3A-Z | IMASI23 |
| K32HCHJ-LEK-M2-00 | 02-052474-00 | IMASI13 |
| K31SSFS-LEK-SS-02 |  6SC6901-0VR07 | IPFLD24 |
| K31HRLG-LDK-NS-00 | 6SC6508-4AA02 | IMSED01 |
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