TEL Tokyo Electron 2180-020891-12印刷电路板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：TEL Tokyo Electron 2180-020891-12 印刷电路板
设备类型：数字输入输出（DIO）互锁电路板
制造商：Tokyo Electron Ltd.（日本东京电子）
一、主要应用领域
半导体制造设备
主要用于Tokyo Electron的清洗、涂胶、光刻等工艺设备。
作为数字信号的输入输出与互锁控制核心板。
安全互锁控制
实现设备关键环节的互锁保护，防止误操作和设备损坏。
协助控制泵浦、阀门等执行机构的安全联动。
数字信号处理
负责外部与内部数字信号的转换、传输和状态监测。
支持与PLC及主控系统之间的数据交互。
二、典型功能概述
数字输入输出接口
设备互锁逻辑控制
状态指示与故障检测
电气隔离保护
便于维护的模块化设计
三、适配系统或产品系列（示例）
Tokyo Electron Clean Track系列
Tokyo Electron涂胶与光刻设备
其他需数字信号互锁控制的半导体工艺设备
英文资料：
Product Name: TEL Tokyo Electron 2180-020891-12 Printed Circuit Board
Device type: Digital Input/Output (DIO) Interlocking Circuit Board
Manufacturer: Tokyo Electron Ltd
1、 Main application areas
Semiconductor Manufacturing Equipment
Mainly used for cleaning, coating, photolithography and other process equipment of Tokyo Electron.
As the input/output and interlock control core board for digital signals.
Security interlock control
Implement interlocking protection for critical equipment links to prevent misoperation and equipment damage.
Assist in controlling the safety linkage of actuators such as pumps and valves.
Digital signal processing
Responsible for the conversion, transmission, and status monitoring of external and internal digital signals.
Support data exchange between PLC and main control system.
2、 Typical Function Overview
Digital input/output interface
Equipment interlock logic control
Status indication and fault detection
Electrical isolation protection
Modular design for easy maintenance
3、 Adaptation system or product series (example)
Tokyo Electron Clean Track Series
Tokyo Electron Coating and Photolithography Equipment
Other semiconductor process equipment requiring digital signal interlock control
2.产 品 展 示
3.其他产品
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