TEL Tokyo Electron 2L51-000013-V1热力板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号：2L51-000013-V1
产品名称：热力板（Thermo Board）
制造商：Tokyo Electron Ltd.（东京电子）
一、产品功能
该热力板用于半导体制造设备中的温度监测与热量控制，主要功能包括：
接收来自热电偶或光纤温度传感器的信号，转换成可由控制系统处理的温度数据。
控制加热器的启停与功率调节，保障制程温度的精确控制。
负责批处理热处理、烘烤过程中的温度管理，确保工艺稳定。
二、典型应用领域
300毫米晶圆热处理设备，如 TELINDY、FORMULA 系列。
半导体清洗和干燥系统中的温控模块。
其他需要精密温控的半导体制造工艺设备。
三、产品特性
支持多通道温度采集和热量管理。
配合光纤温度传感器等高精度传感器使用。
设计适应半导体制造洁净室环境。
模块化设计，便于维护和更换。
英文资料：
Product model: 2L51-000013-V1
Product Name: Thermo Board
Manufacturer: Tokyo Electron Ltd
1、 Product Features
This heat plate is used for temperature monitoring and heat control in semiconductor manufacturing equipment, and its main functions include:
Receive signals from thermocouples or fiber optic temperature sensors and convert them into temperature data that can be processed by the control system.
Control the start stop and power regulation of the heater to ensure precise control of the process temperature.
Responsible for temperature management during batch heat treatment and baking processes to ensure process stability.
2、 Typical application areas
300mm wafer heat treatment equipment, such as TELINDY and FORMULA series.
Temperature control module in semiconductor cleaning and drying system.
Other semiconductor manufacturing process equipment that requires precise temperature control.
3、 Product Features
Support multi-channel temperature acquisition and heat management.
Used in conjunction with high-precision sensors such as fiber optic temperature sensors.
Design to adapt to the clean room environment of semiconductor manufacturing.
Modular design for easy maintenance and replacement.
2.产 品 展 示
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| PC833-001-F | 6SC6108-0SG01 | 57310001-KY DSCL110A ABB |
| PC833-001-A | AMAT 0100-20416 | HESG447427R0001 70EI05A-E |
| PC832-XYZ-T |  AMAT 0100-90659 | 57330001-Y DSBB110A ABB |
| PC832-XYZ-N | AMAT 0100-91040 | NFTP01 |
| PC832-XYZ-A | AMAT 0100-00120 | HESG332194R0001 70BK06A-E |
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