TEL Tokyo Electron 2L81-050133-V1定时板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：2L81-050133-V1
别名：TAB35F-1/HTIL 定时控制板
制造商：Tokyo Electron Ltd.（东京电子）
产品类型：定时控制电路板（Timer Board）
一、产品功能说明
该模块是一块用于控制工艺时序的定时电路板，主要实现对设备中动作过程的时间管理与逻辑控制，功能包括：
时间控制逻辑
控制操作的延时启动与停止（如阀门开关、气体释放、抽真空、加热等过程）
设备安全联锁
实现模块之间的启停联动，确保设备按预设逻辑安全运作，避免误操作
工艺节拍管理
支持工艺流程中各个步骤的精确计时，用于步进工艺或多阶段控制系统
二、应用领域
此定时板主要用于 Tokyo Electron 半导体制造设备 中，典型应用设备如下：
CVD（化学气相沉积）设备
控制气体通断、加热时间、冷却时间等阶段动作
Etch（蚀刻）设备
控制工艺腔体的真空建立、等离子体启动及关断节奏
清洗设备（如 ACT 系列）
控制水流、气体和干燥风流程中的切换时间点
背后电控柜中的时间继电模块替代件
用于替代传统的物理时间继电器，实现数字化时序控制
三、技术特性（可能包含）
多通道时间控制功能
设定/调整时延参数的电位器或跳线（jumper）
板载继电器、电容、电阻等计时元件
接口标准化设计，适配 TEL 控制框架
英文资料：
Product Name: 2L81-050133-V1
Alias: TAB35F-1/HTIL Timing Control Board
Manufacturer: Tokyo Electron Ltd
Product type: Timer Board
1、 Product Function Description
This module is a timing circuit board used to control process timing, mainly realizing time management and logic control of the action process in the equipment. Its functions include:
Time control logic
Delay start and stop of control operations (such as valve opening and closing, gas release, vacuuming, heating, etc.)
Equipment safety interlock
Implement start stop linkage between modules to ensure safe operation of equipment according to preset logic and avoid misoperation
Process rhythm management
Support precise timing of each step in the process flow, used for step-by-step processes or multi-stage control systems
2、 Application Fields
This timing board is mainly used in Tokyo Electron semiconductor manufacturing equipment, with typical application devices as follows:
CVD (Chemical Vapor Deposition) equipment
Control gas on/off, heating time, cooling time and other stage actions
Etch equipment
Control the vacuum establishment, plasma startup, and shutdown rhythm of the process chamber
Cleaning equipment (such as ACT series)
Control the switching time points in the flow of water, gas, and dry air
Replacement parts for time relay module in the back control cabinet
Used to replace traditional physical time relays and achieve digital timing control
3、 Technical characteristics (may include)
Multi channel time control function
Potentiometer or jumper for setting/adjusting delay parameters
Onboard timing components such as relays, capacitors, resistors, etc
Standardized interface design, compatible with TEL control framework
2.产 品 展 示
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UFC760BE143 inverter high-voltage board
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| PC843-XYZ-N | 6SC6500-0UC01 | MC-PDOX02 |
| PC843-XYZ-F | 6SC6100-0GA00 | NTDI01 |
| PC843-XYZ-A | 6SC6120-0FE00 | NKTT01-3 |
| PC843-001-T |  6SC6101-2B-Z | HESG447433R0001 70BV05A-ES |
| PC843-001-N | 6SC6100-0GA11 | HESG446933R0002 70AB02B-E |
| PC843-001-F | 6SC6140-0FE00 | NTAI06 |
| PC843-001-A | 6SC6100-0NA01 | HESG447043R0001 70VV01A |
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