TEL Tokyo Electron 2981-600328-11直流电源分支板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号：TEL Tokyo Electron 2981-600328-11
产品类型：直流电源分支板（DC Power Branch Board）
制造商：Tokyo Electron Ltd.（东京电子）
一、产品功能说明
该模块是一块直流电源分支用的电路板，主要用于从主电源输入中分出多路直流电压输出，供设备内部多个功能模块使用。
主要功能包括：
直流电源输入接收
接收设备主电源系统提供的 DC 电压（如 +24V、+12V 等）
多路电源分配
将电源分配至多个目标子系统，包括控制模块、驱动模块、传感器等
保护与稳定功能
板上通常包含电流保护（如保险丝）、滤波器或电源状态检测功能，确保输出电源稳定、安全。
二、典型应用场景
2981-600328-11 直流电源分支板主要用于 Tokyo Electron 的多种半导体设备中，具体应用包括：
ACT 系列清洗设备
如 ACT 8、ACT 12、ACT 300 等型号
控制设备中的流体系统（泵、阀）、干燥风机、加热器等部件的供电
CVD/Etch 系列设备
在腔体控制、电气联锁、安全控制系统中承担电源分配任务
设备模块化维护
作为标准电源分配板，具有可更换、可热插拔的设计特点，有利于设备维护和快速更换
三、产品特性（综合归纳）
支持多路直流电压输出（具体视版本而定）
通常具备可插拔端口和电缆连接器
板载可能集成电流保护、电压指示灯
安装于设备后部或电源舱中
提高系统电源供给的可靠性与可维护性
英文资料：
Product model: TEL Tokyo Electron 2981-600328-11
Product type: DC Power Branch Board
Manufacturer: Tokyo Electron Ltd
1、 Product Function Description
This module is a circuit board for DC power supply branching, mainly used to split multiple DC voltage outputs from the main power input for use by multiple functional modules inside the device.
The main functions include:
DC power input reception
Receive DC voltage provided by the main power supply system of the receiving device (such as+24V,+12V, etc.)
Multi channel power distribution
Distribute power to multiple target subsystems, including control modules, drive modules, sensors, etc
Protection and stability function
The board usually includes current protection (such as fuses), filters, or power status detection functions to ensure stable and safe output power supply.
2、 Typical application scenarios
The 2981-600328-11 DC power branch board is mainly used in various semiconductor devices of Tokyo Electron, including:
ACT series cleaning equipment
Models such as ACT 8, ACT 12, ACT 300, etc
Power supply for fluid systems (pumps, valves), drying fans, heaters, and other components in control equipment
CVD/Etch series equipment
Undertake power distribution tasks in cavity control, electrical interlocking, and safety control systems
Modular maintenance of equipment
As a standard power distribution board, it has the design features of being replaceable and hot swappable, which is conducive to equipment maintenance and quick replacement
3、 Product characteristics (comprehensive summary)
Support multiple DC voltage outputs (depending on the version)
Usually equipped with pluggable ports and cable connectors
Onboard may integrate current protection and voltage indicator lights
Installed at the rear of the equipment or in the power compartment
Improve the reliability and maintainability of system power supply
2.产 品 展 示
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