TEL Tokyo Electron 3D81-000036-11传感器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3D81-000036-11 传感器模块简介
产品定义：
3D81-000036-11 是 Tokyo Electron（TEL）半导体设备中使用的一款传感器模块，负责采集设备内部关键物理量（如温度、压力、位置等）的信号，并将其转换成电气信号供控制系统处理。主要功能：
接收并转换各种传感器信号（模拟或数字）
预处理信号（滤波、放大、转换）以提高信号质量
将传感器数据传输至主控制器或数据采集系统
适用设备类型：
广泛应用于 TEL 的晶圆制造设备，如 CVD、Etch、Clean Track、ALD 系统等，用于设备状态监控和工艺参数控制。支持传感器类型：
温度传感器（热电偶、RTD）
压力传感器
位移传感器
气体流量传感器
其他环境及工艺监测传感器
产品特点：
高精度信号采集与转换
抗电磁干扰设计，适应洁净室环境
多通道输入，支持多种传感器同时接入
模块化设计，便于更换和维护
安装位置：
通常安装在设备控制柜或传感器接口区，通过连接线与各类传感器直接连接。典型应用场景：
设备环境温度和压力监测
工艺参数实时采集
位置检测及机械状态监测
预警及故障诊断支持
英文资料：
Introduction to TEL Tokyo Electron 3D81-000036-11 Sensor Module
Product definition:
3D81-000036-11 is a sensor module used in Tokyo Electron (TEL) semiconductor equipment, responsible for collecting signals of key physical quantities (such as temperature, pressure, position, etc.) inside the equipment and converting them into electrical signals for control system processing.
Main functions:
Receive and convert various sensor signals (analog or digital)
Preprocess signals (filtering, amplifying, converting) to improve signal quality
Transfer sensor data to the main controller or data acquisition system
Applicable device types:
Widely used in TEL wafer manufacturing equipment, such as CVD, Etch, Clean Track, ALD systems, etc., for equipment status monitoring and process parameter control.
Supported sensor types:
Temperature sensors (thermocouples, RTDs)
Pressure sensor
Displacement sensor
Gas flow sensor
Other environmental and process monitoring sensors
Product features:
High precision signal acquisition and conversion
Anti electromagnetic interference design, suitable for clean room environment
Multi channel input, supporting multiple sensors to be connected simultaneously
Modular design for easy replacement and maintenance
Installation location:
Usually installed in the equipment control cabinet or sensor interface area, it is directly connected to various sensors through connecting wires.
Typical application scenarios:
Equipment environmental temperature and pressure monitoring
Real time collection of process parameters
Position detection and mechanical status monitoring
Warning and fault diagnosis support
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