TEL Tokyo Electron 3D81-000018电机分配板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3D81-000018 电机分配板简介
产品定义：
3D81-000018 是 Tokyo Electron（TEL）设备中的一款电机分配板（Motor Distribution Board），主要用于集中管理多个电机的电源与控制信号分配，是运动控制系统中的核心部件之一。主要功能：
将来自主控制器（如 PLC 或运动控制卡）的控制信号、电源信号分配到多个电机通道，实现多电机协同驱动和分区管理。适用设备类型：
适用于 TEL 的晶圆处理设备，如 CVD（化学气相沉积）、Etch（干法蚀刻）、Coater/Developer（涂胶显影）、Load Port、EFEM 自动化模块等。支持的电机类型：
步进电机
伺服电机
直流/无刷电机
板上可能集成电机驱动接口或与外部驱动器配套工作。产品特点：
多通道输出，支持多个电机同时连接
带有过流保护、保险丝、控制继电器等元件
可接收位置反馈、限位开关等输入信号
接线清晰，具备状态指示灯，便于调试与维护
安装位置：
一般位于设备内部的控制模块区域、运动控制子系统中，靠近执行机构或电机本体，以缩短线缆路径，减少干扰。典型应用场景：
晶圆搬运机械臂的多轴控制
升降平台或对位机构
旋转、加载/卸载装置的电机协调控制
掩膜版移动与夹持机构的电机管理
英文资料：
Introduction to TEL Tokyo Electron 3D81-000018 Motor Distribution Board
Product definition:
3D81-000018 is a motor distribution board in Tokyo Electron (TEL) equipment, mainly used for centralized management of power and control signal distribution for multiple motors. It is one of the core components in motion control systems.
Main functions:
In the future, the control signals and power signals of autonomous controllers (such as PLCs or motion control cards) will be distributed to multiple motor channels to achieve coordinated driving and zone management of multiple motors.
Applicable device types:
Suitable for TEL wafer processing equipment, such as CVD (chemical vapor deposition), Etch (dry etching), Coat/Developer (coating and development), Load Port, EFEM automation module, etc.
Supported motor types:
stepping motor
servo motor
DC/brushless motor
The board may integrate motor drive interfaces or work in conjunction with external drivers.
Product features:
Multi channel output, supporting simultaneous connection of multiple motors
Equipped with overcurrent protection, fuses, control relays and other components
Can receive input signals such as position feedback and limit switches
Clear wiring, equipped with status indicator lights for easy debugging and maintenance
Installation location:
Generally located in the control module area and motion control subsystem inside the device, close to the actuator or motor body, to shorten the cable path and reduce interference.
Typical application scenarios:
Multi axis control of wafer handling robotic arm
Lifting platform or alignment mechanism
Coordinated control of motors for rotating, loading/unloading devices
Motor management of mask moving and clamping mechanism
2.产 品 展 示
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