TEL Tokyo Electron 3D81-000061-V1电机单元模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3D81-000061-V1 电机单元模块简介
产品定义：
3D81-000061-V1 是一款用于 Tokyo Electron 半导体设备的电机单元模块，用于驱动、控制并监测设备中执行机构（如滑台、旋转平台、机械臂等）的电机动作。主要功能：
控制电机的启停、转速、方向、位置等运行参数，同时接收编码器或位置反馈信号，实现闭环控制，确保机械动作精准可靠。适用设备类型：
广泛应用于 TEL 的 CVD、Etch、ALD、Coater/Developer 等晶圆处理设备中，负责晶圆搬运、对位、加载/卸载等自动化动作控制。控制支持内容：
步进电机或伺服电机控制
PWM 或电流控制输出
编码器信号输入接口
电机制动、急停保护功能
产品特点：
响应速度快、控制精度高
多通道输出，支持多电机联动控制
板载诊断功能（如过载、位置偏移检测）
接口标准化，便于集成与替换
安装位置：
一般安装在设备控制柜、电机驱动区或运动子系统模块内部，通过信号线与主控制器及电机本体连接。典型应用场景：
晶圆升降机构控制
搬运机械臂的回转/伸缩动作
掩膜版或晶圆对位平台的精密调整
涂胶显影设备中的旋转平台控制
英文资料：
Introduction to TEL Tokyo Electron 3D81-000061-V1 Motor Unit Module
Product definition:
3D81-000061-V1 is a motor unit module for Tokyo Electron semiconductor equipment, used to drive, control, and monitor the motor actions of actuators (such as slide tables, rotating platforms, robotic arms, etc.) in the equipment.
Main functions:
Control the starting and stopping, speed, direction, position and other operating parameters of the motor, while receiving encoder or position feedback signals to achieve closed-loop control and ensure precise and reliable mechanical action.
Applicable device types:
Widely used in TEL's CVD, Etch, ALD, Coater/Developer and other wafer processing equipment, responsible for automated action control such as wafer handling, alignment, loading/unloading.
Control support content:
Stepper motor or servo motor control
PWM or current control output
Encoder signal input interface
Motor braking and emergency stop protection function
Product features:
Fast response speed and high control accuracy
Multi channel output, supporting multi motor linkage control
Onboard diagnostic functions (such as overload and position offset detection)
Standardization of interfaces for easy integration and replacement
Installation location:
Generally installed inside the equipment control cabinet, motor drive area, or motion subsystem module, connected to the main controller and motor body through signal lines.
Typical application scenarios:
Wafer lifting mechanism control
Rotation/extension action of the handling robotic arm
Precise adjustment of mask or wafer alignment platform
Rotating platform control in adhesive developing equipment
2.产 品 展 示
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