TEL Tokyo Electron 3281-000132-12配电板 PDF资料
1.产 品 资 料 介 绍:
中文资料:
TEL Tokyo Electron 3281-000132-12 配电板简介
产品定义:
3281-000132-12 是一款用于 Tokyo Electron 半导体设备中的配电板,主要功能是接收主电源输入并将其稳定分配至多个子系统模块,如控制器、电机、传感器、电磁阀等。主要功能:
实现电力从主电源到各个功能单元的有序、稳定分配,同时提供过流保护、短路保护和电源状态指示功能。适用设备类型:
适用于 TEL 的各种晶圆处理设备,如 CVD(化学气相沉积)、Etch(干法蚀刻)、Coater/Developer(涂胶显影设备)、Wafer Transfer 系统等。分配电压范围:
通常支持如 +24V、+12V、+5V 等多组直流输出电压,供给不同电压等级的设备模块。产品特点:
多通道输出,支持并联或独立负载
高稳定性,抗干扰能力强
板载保险丝或电子保护电路,保障电路安全
带状态LED指示,便于诊断电源通断或故障
安装位置:
一般安装在控制柜、设备主机内部靠近主电源或DC转换模块的位置,通过接线端子或连接器输出到其他模块。典型应用场景:
控制系统供电分配(如PLC、控制板)
电机驱动系统供电(步进/伺服)
气体控制单元供电(MFC、电磁阀)
辅助模块供电(灯、风扇、传感器等)
英文资料:
Introduction to TEL Tokyo Electron 3281-000132-12 Distribution Board
Product definition:
3281-000132-12 is a distribution board used in Tokyo Electron semiconductor equipment. Its main function is to receive main power input and stably distribute it to multiple subsystem modules, such as controllers, motors, sensors, solenoid valves, etc.
Main functions:
Realize orderly and stable distribution of electricity from the main power source to various functional units, while providing overcurrent protection, short-circuit protection, and power status indication functions.
Applicable device types:
Suitable for various wafer processing equipment of TEL, such as CVD (chemical vapor deposition), Etch (dry etching), Coach/Developer (coating and developing equipment), Wafer Transfer system, etc.
Distribution voltage range:
Usually supports multiple sets of DC output voltages such as+24V,+12V,+5V, etc., to supply equipment modules with different voltage levels.
Product features:
Multi channel output, supporting parallel or independent loads
High stability, strong anti-interference ability
Onboard fuses or electronic protection circuits ensure circuit safety
Equipped with status LED indicator for easy diagnosis of power on/off or faults
Installation location:
Generally installed inside the control cabinet or equipment host near the main power supply or DC conversion module, and output to other modules through wiring terminals or connectors.
Typical application scenarios:
Control system power distribution (such as PLC, control board)
Power supply for motor drive system (stepper/servo)
Gas control unit power supply (MFC, solenoid valve)
Auxiliary module power supply (lights, fans, sensors, etc.)
2.产 品 展 示
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