TEL Tokyo Electron 3D81-000017-V3电源模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3D81-000017-V3 电源模块简介
产品定义：
3D81-000017-V3 是一款用于 Tokyo Electron 半导体设备的专用电源模块，用于为控制系统、驱动板、传感器等子系统提供稳定的直流电源。主要功能：
将交流输入电源（如AC 100~240V）转换为多个稳定的直流输出（如+24V、+12V、+5V等），为设备内部关键电路供电。典型应用设备：
广泛用于 TEL 的晶圆蚀刻系统（Etch）、CVD 系统、ALD 系统、清洗系统等高端半导体工艺设备中，是控制系统不可或缺的一部分。支持输出范围：
输出电压可能包含单一或多组直流电压，电流容量支持多模块同时运行，并具备低纹波输出特性，满足精密控制要求。产品特点：
高可靠性，工业级元件构成
多重保护：过压、过流、短路和过温保护
模块化设计，便于安装更换
稳定性强，适用于精密电子环境
安装位置：
通常位于设备的控制柜或主电源舱内，靠近接口板或控制器，用导轨或螺钉固定。应用场景：
控制主板供电
I/O接口、传感器供电
电磁阀、MFC（质量流量计）等设备供电
为子系统模块如风扇、电机驱动器等提供能量支持
英文资料：
Introduction to TEL Tokyo Electron 3D81-000017-V3 Power Module
Product definition:
3D81-000017-V3 is a dedicated power module for Tokyo Electron semiconductor equipment, used to provide stable DC power to subsystems such as control systems, driver boards, sensors, etc.
Main functions:
Convert AC input power (such as AC 100-240V) into multiple stable DC outputs (such as+24V,+12V,+5V, etc.) to power critical circuits inside the equipment.
Typical application devices:
Widely used in high-end semiconductor process equipment such as wafer etching systems (Etch), CVD systems, ALD systems, cleaning systems, etc. for TEL, it is an indispensable part of the control system.
Support output range:
The output voltage may include a single or multiple sets of DC voltages, with current capacity supporting simultaneous operation of multiple modules and low ripple output characteristics to meet precision control requirements.
Product features:
High reliability, composed of industrial grade components
Multiple protections: overvoltage, overcurrent, short circuit, and over temperature protection
Modular design, easy to install and replace
Strong stability, suitable for precision electronic environments
Installation location:
Usually located in the control cabinet or main power compartment of the equipment, close to the interface board or controller, fixed with rails or screws.
Application scenarios:
Control the power supply of the motherboard
I/O interface, sensor power supply
Power supply for equipment such as solenoid valves and MFCs (mass flow meters)
Provide energy support for subsystem modules such as fans, motor drivers, etc
2.产 品 展 示
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