TEL Tokyo Electron 1181-000826-14电机分配板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1181-000826-14 电机分配板简介
产品定义：
1181-000826-14 是一款用于东京电子半导体设备中的电机分配板，负责对多台电机的控制信号和供电电源进行统一分发和管理。主要功能：
集中分配来自主控制器的启动、停止、转速调节等控制信号，协调多台电机同步或独立运行，同时向电机模块供电。适用设备类型：
常用于TEL的晶圆传输系统、自动搬运装置、气阀控制系统和精密定位机构等设备中，如 CVD、Etch、Coater/Developer 等。支持电机类型：
一般支持步进电机、伺服电机、小型直流电机，具备多通道控制接口，适用于多轴电机系统。产品特点：
多通道输出，支持多台电机同时接入
带有状态指示和过流/短路保护电路
接线清晰，便于调试与维护
电磁干扰抑制能力强，适合洁净室环境运行
安装位置：
通常安装在设备主控柜或运动控制单元内，靠近电机驱动模块与运动轴。典型应用场景：
晶圆升降机构
Wafer transfer arms（搬运臂）
工艺腔体内的旋转/传送机构
掩膜板移动、夹持等动作系统
英文资料：
Introduction to TEL Tokyo Electron 1181-000826-14 Motor Distribution Board
Product definition:
1181-000826-14 is a motor distribution board used in Tokyo electronic semiconductor equipment, responsible for the unified distribution and management of control signals and power supply for multiple motors.
Main functions:
Centralize the distribution of control signals such as start, stop, and speed regulation from the main controller, coordinate the synchronous or independent operation of multiple motors, and supply power to the motor module at the same time.
Applicable device types:
Commonly used in equipment such as wafer transfer systems, automatic handling devices, gas valve control systems, and precision positioning mechanisms in TEL, such as CVD, Etch, Coater/Developer, etc.
Supported motor types:
Generally supports stepper motors, servo motors, and small DC motors, with multi-channel control interfaces, suitable for multi axis motor systems.
Product features:
Multi channel output, supporting multiple motors to be connected simultaneously
Equipped with status indication and overcurrent/short circuit protection circuit
Clear wiring for easy debugging and maintenance
Strong electromagnetic interference suppression capability, suitable for operation in clean room environments
Installation location:
Usually installed in the equipment main control cabinet or motion control unit, close to the motor drive module and motion axis.
Typical application scenarios:
Wafer lifting mechanism
Wafer transfer arms
Rotating/conveying mechanism inside the process chamber
Mask board movement, clamping and other action systems
2.产 品 展 示
3.其他产品
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| IC3600SCBK1 | 531X300CCHACM1 | IC3600SSIB1 |
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| IC3600SCBE1 | 531X300CCHAAFM5 | IC3600SSFG1B1A |
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