TEL Tokyo Electron 3281-000137-11接口板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：TEL Tokyo Electron 3281-000137-11 接口板
基本功能：作为设备内部信号的连接和转换桥梁，负责将控制器的信号传递到执行部件，同时将反馈信号传回控制系统。
信号类型：支持数字输入输出、模拟信号传输及部分通信接口，满足多种控制需求。
应用环境：广泛应用于半导体制造设备中的气体控制、真空系统、温度调节及机械控制等子系统。
结构特点：模块化设计，便于拆装维护，具备良好的抗电磁干扰能力和稳定性。
接口形式：采用标准工业连接器和端子，方便与其他控制模块和传感器连接。
保护功能：具备一定的电气保护措施，如过流保护和信号隔离，确保系统安全可靠。
安装位置：通常安装于设备控制柜内，靠近相关控制模块或执行单元。
适用设备：兼容多款TEL晶圆处理设备，包括CVD、Etch、清洗及搬运系统等。
英文资料：
Product Name: TEL Tokyo Electron 3281-000137-11 Interface Board
Basic function: As a bridge for connecting and converting internal signals of the device, responsible for transmitting signals from the controller to the executing components and transmitting feedback signals back to the control system.
Signal type: Supports digital input/output, analog signal transmission, and some communication interfaces to meet various control requirements.
Application environment: Widely used in subsystems such as gas control, vacuum systems, temperature regulation, and mechanical control in semiconductor manufacturing equipment.
Structural features: Modular design, easy to disassemble and maintain, with good resistance to electromagnetic interference and stability.
Interface form: Standard industrial connectors and terminals are used for easy connection with other control modules and sensors.
Protection function: It has certain electrical protection measures, such as overcurrent protection and signal isolation, to ensure the safety and reliability of the system.
Installation location: Usually installed inside the equipment control cabinet, close to the relevant control module or execution unit.
Applicable equipment: Compatible with multiple TEL wafer processing equipment, including CVD, Etch, cleaning and handling systems, etc.
2.产 品 展 示
3.其他产品
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4.其他英文产品
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Asea 2668-184-280 12 slot control board
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| IC3600SGDE1 | 6DD1682-0CG0 | IC3600SSZA1 |
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