TEL Tokyo Electron 1208-001196-11传感器板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1208-001196-11 传感器板（Sensor Board） 是半导体设备中的关键模块，用于采集并处理来自各种传感器的信号，实现对设备状态和环境参数的监测和控制。
一、产品基本信息
| 项目 | 内容 |
|---|---|
| 型号 | 1208-001196-11 |
| 名称 | 传感器板（Sensor Board） |
| 制造商 | Tokyo Electron Ltd. (TEL) |
| 功能类型 | 多传感器信号采集与调理模块 |
二、核心功能
| 功能类别 | 说明 |
|---|---|
| 多通道传感器信号采集 | 支持温度、压力、湿度等多种传感器输入 |
| 信号调理与放大 | 对传感器输出的模拟信号进行放大和滤波 |
| 信号转换 | 模拟信号转数字信号，便于主控制系统处理 |
| 状态监测 | 实时采集环境和设备参数，支持报警功能 |
三、典型应用领域
| 应用场景 | 说明 |
|---|---|
| 晶圆制造设备 | 监测温度、压力、气体流量等关键工艺参数 |
| 真空系统 | 采集真空压力传感器信号 |
| 气体供应系统 | 监测气体流量和阀门状态 |
| 设备安全联锁系统 | 监控门开关、泄漏检测等安全传感器状态 |
英文资料：
The TEL Tokyo Electron 1208-001196-11 Sensor Board is a key module in semiconductor equipment, used to collect and process signals from various sensors, achieve monitoring and control of equipment status and environmental parameters.
1、 Basic Product Information
Project Content
Model 1208-001196-11
Name: Sensor Board
Manufacturer Tokyo Electron Ltd. (TEL)
Function type: Multi sensor signal acquisition and conditioning module
2、 Core functions
Function category description
Multi channel sensor signal acquisition supports multiple sensor inputs such as temperature, pressure, humidity, etc
Signal conditioning and amplification amplify and filter the analog signals output by sensors
Signal conversion from analog to digital for easy processing by the main control system
Real time collection of environmental and device parameters for status monitoring, supporting alarm function
3、 Typical application areas
Application scenario description
Monitoring key process parameters such as temperature, pressure, and gas flow rate in wafer manufacturing equipment
Vacuum system collects signals from vacuum pressure sensors
Gas supply system monitors gas flow and valve status
The equipment safety interlock system monitors the status of safety sensors such as door switches and leak detection
2.产 品 展 示
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| IC3600SOTE1 | CACR-SR15SZ1SDY77 | 61-0950-10 |
| IC3600SOTD1E | CACR-SRCA20BBS | IC660ELB906S |
| IC3600SOTD1 | CACR-IR44SB | 131178-01 |
| IC3600SOSL2A | CACR-SR20BZ1SF | EPC-5 |
| IC3600SOSG1D | CACR-SR30BE12D-C | EPC5-33-00-UI |
| IC3600SOSG1 | GESPAC GESCIO-1 | 4522-167-02301 |
| IC3600SOSF1F1B | CACR-HR03BAB11 | 061-10318-0003 |
| IC3600SOSF1E | CACR-SR01AB2ER | 97-9029-04, |
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