TEL Tokyo Electron 1B80-002389-11传感器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1B80-002389-11 传感器模块（Sensor Module） 是专为半导体制造设备设计的一款关键检测组件，用于采集环境或设备运行参数，实现对工艺过程的精确监控与控制。此模块通常集成多种传感器类型，支持信号调理和数字/模拟输出，确保系统能够实时响应关键参数变化。
一、产品基本信息
| 项目 | 内容 |
|---|---|
| 产品型号 | 1B80-002389-11 |
| 产品名称 | 传感器模块（Sensor Module） |
| 制造商 | Tokyo Electron Ltd. (TEL) |
| 模块类型 | 多功能信号采集与传感器接口模块 |
二、核心功能与作用
| 功能类别 | 详细说明 |
|---|---|
| 多传感器集成 | 支持温度、压力、湿度、气体流量等多种传感器输入接口。 |
| 信号调理 | 对传感器输出的弱电信号进行放大、滤波和转换。 |
| 数据输出 | 提供标准模拟电压/电流输出或数字信号传输，方便与主控系统对接。 |
| 实时监测 | 持续采集环境及设备参数，实现工艺过程的精准控制。 |
| 报警功能 | 可配置阈值报警，及时提示异常状态。 |
三、典型应用领域
| 应用系统 | 具体用途 |
|---|---|
| 真空系统 | 监测真空度传感器信号，保障设备腔体密封性。 |
| 气体供应系统 | 采集质量流量计（MFC）、压力传感器信号，控制气体流量。 |
| 温度控制系统 | 接收热电偶或RTD温度传感器信号，用于加热或冷却调节。 |
| 安全联锁系统 | 监控门开关、气体泄漏等安全传感器信号。 |
英文资料：
The TEL Tokyo Electron 1B80-002389-11 Sensor Module is a critical detection component designed specifically for semiconductor manufacturing equipment. It is used to collect environmental or equipment operating parameters, enabling precise monitoring and control of the process. This module typically integrates multiple sensor types, supports signal conditioning and digital/analog output, ensuring that the system can respond in real-time to changes in key parameters.
1、 Basic Product Information
Project Content
Product model 1B80-002389-11
Product Name: Sensor Module
Manufacturer Tokyo Electron Ltd. (TEL)
Module type: Multi functional signal acquisition and sensor interface module
2、 Core functions and roles
Detailed description of functional categories
Multi sensor integration supports multiple sensor input interfaces such as temperature, pressure, humidity, gas flow, etc.
Signal conditioning amplifies, filters, and converts the weak electrical signals output by sensors.
The data output provides standard analog voltage/current output or digital signal transmission, making it easy to interface with the main control system.
Real time monitoring continuously collects environmental and equipment parameters to achieve precise control of the process.
The alarm function can be configured with threshold alarms to promptly prompt abnormal states.
3、 Typical application areas
Specific purpose of the application system
The vacuum system monitors the vacuum sensor signal to ensure the sealing of the equipment chamber.
The gas supply system collects signals from mass flow meters (MFCs) and pressure sensors to control the gas flow rate.
The temperature control system receives signals from thermocouples or RTD temperature sensors for heating or cooling regulation.
The safety interlock system monitors signals from safety sensors such as door switches and gas leaks.
2.产 品 展 示
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