TEL Tokyo Electron 1281-001195-1前置放大器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1281-001195-1 前置放大器模块（Preamplifier Module） 是一款专用于半导体制造设备中的模拟信号增强组件，通常安装于传感器或检测电路前端，用于微弱信号的初步放大与调理。其主要作用是在不引入显著噪声的前提下，将输入信号提升至可由主控系统或ADC处理的有效电平。
一、产品概述
| 项目 | 内容 |
|---|---|
| 产品型号 | 1281-001195-1 |
| 产品名称 | 前置放大器模块（Preamplifier Module） |
| 制造商 | Tokyo Electron Ltd. (TEL) |
| 应用类型 | 弱信号检测、模拟前级放大、电荷/电流调理 |
二、核心功能与作用
| 功能 | 说明 |
|---|---|
| 信号放大 | 放大微弱的模拟信号（如电流、电压、光电、热电偶信号等）至后级可解析的范围。 |
| 低噪声调理 | 具备低噪声运放，保留原始信号特性，抑制干扰与漂移。 |
| 信号隔离（部分型号） | 可提供与主系统之间的电气隔离，提高抗干扰性能。 |
| 滤波整形 | 对信号进行滤波，移除高频干扰或直流偏置。 |
三、典型应用领域（适用于TEL设备中的模块）
| 应用系统 | 功能说明 |
|---|---|
| 温控系统（Heater/Chiller） | 放大热电偶或RTD的微弱电压信号供后级采样。 |
| 真空/压力传感系统 | 放大压力变送器或电容式真空计的输出信号。 |
| 光学检测模块 | 在光电探测器或CCD系统中处理光信号（如晶圆检测系统）。 |
| 离子源/等离子系统 | 检测电流、电压波动，实现反馈闭环控制。 |
四、技术特性（基于 TEL 同系列模块推测）
| 项目 | 特性说明 |
|---|---|
| 放大倍数 | 可配置增益（如 x10, x100, x1000），匹配不同信号输入电平 |
| 输入类型 | 差分/单端输入支持，适应多种传感器接口 |
| 输出信号 | 模拟电压输出（05V 或 010V）供 ADC/PLC 使用 |
| 电源要求 | ±12V 或 ±15V，部分带稳压隔离电源模块 |
| 结构形式 | 板卡式或模块化封装，安装于 TEL 控制架内部或信号处理箱 |
英文资料：
The TEL Tokyo Electron 1281-001195-1 Preamplifier Module is an analog signal enhancement component specifically designed for semiconductor manufacturing equipment. It is typically installed at the front end of sensors or detection circuits and is used for preliminary amplification and conditioning of weak signals. Its main function is to elevate the input signal to an effective level that can be processed by the main control system or ADC without introducing significant noise.
1、 Product Overview
Project Content
Product model 1281-001195-1
Product Name Preamplifier Module
Manufacturer Tokyo Electron Ltd. (TEL)
Application type: weak signal detection, analog preamplifier, charge/current conditioning
2、 Core functions and roles
Function Description
Signal amplification amplifies weak analog signals (such as current, voltage, photoelectric, thermocouple signals, etc.) to a range that can be resolved by the subsequent stage.
Low noise conditioning has a low-noise operational amplifier that preserves the original signal characteristics, suppresses interference and drift.
Signal isolation (some models) can provide electrical isolation from the main system, improving anti-interference performance.
Filtering shaping filters signals to remove high-frequency interference or DC bias.
3、 Typical application areas (applicable to modules in TEL devices)
Application System Function Description
The temperature control system (Heater/Chiller) amplifies the weak voltage signal of thermocouples or RTDs for subsequent sampling.
The vacuum/pressure sensing system amplifies the output signal of the pressure transmitter or capacitive vacuum gauge.
The optical detection module processes optical signals in photodetectors or CCD systems (such as wafer detection systems).
Ion source/plasma system detects current and voltage fluctuations to achieve feedback closed-loop control.
4、 Technical characteristics (inferred based on TEL modules of the same series)
Project Characteristics Description
The amplification factor can be configured with gains (such as x10, x100, x1000) to match different signal input levels
Input type differential/single ended input support, adaptable to multiple sensor interfaces
Output signal analog voltage output (05V or 010V) for ADC/PLC use
Power requirements: ± 12V or ± 15V, some with voltage stabilization and isolation power modules
Structural form board card or modular packaging, installed inside TEL control rack or signal processing box
2.产 品 展 示
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