TEL Tokyo Electron 1D81-000129接口面板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1D81-000129 接口面板（Interface Panel） 是应用于半导体设备中的标准电气/信号接口模块，主要用于将主控制系统与各类子系统（如真空、气体、搬运、温控等）之间的信号、电源或通信线路进行集中连接与管理。它在设备系统中起到桥接、隔离、分发和维护方便的作用。
一、产品基本信息
| 项目 | 内容 |
|---|---|
| 产品型号 | 1D81-000129 |
| 产品名称 | 接口面板（Interface Panel） |
| 制造商 | Tokyo Electron Ltd. (TEL) |
| 面板功能定位 | 电气/通信接口集成与分布式连接平台 |
| 安装位置 | 控制柜、主控制系统后背板或I/O机架内前端区域 |
二、主要功能与作用
| 功能类别 | 描述 |
|---|---|
| 信号集中连接 | 将分散的信号线缆、通信线或电源线汇集于一体，统一接入控制系统。 |
| 物理接口标准化 | 提供标准化接口（如 D-sub、MIL、端子排），便于线缆管理和快速更换。 |
| 电气隔离/保护 | 与控制系统之间通过光耦或防雷器进行信号保护（可选功能）。 |
| 便于维护 | 明确的接口标识与模块化布局，便于排障与系统升级。 |
三、典型应用领域
该模块适用于以下 TEL 系统内的子模块信号汇接与管理：
1. 气体输送系统（GAS BOX）
接口MFC、阀门驱动板、流量监测器；
管理气体路径信号输入输出。
2. 真空系统控制
真空泵启停、真空计信号输入；
联锁控制信号与报警信号汇总。
3. 腔体温控系统
加热器开关、电源信号、热电偶/RTD传感器信号输入连接。
4. 晶圆搬运/机械臂系统
工艺臂、升降台位置传感器；
安全门联锁与动作完成反馈。
英文资料：
TEL Tokyo Electron 1D81-000129 Interface Panel is a standard electrical/signal interface module used in semiconductor equipment, mainly used to centrally connect and manage signals, power or communication lines between the main control system and various subsystems (such as vacuum, gas, handling, temperature control, etc.). It plays a role in bridging, isolating, distributing, and facilitating maintenance in device systems.
1、 Basic Product Information
Project Content
Product model 1D81-000129
Product Name Interface Panel
Manufacturer Tokyo Electron Ltd. (TEL)
Panel Function Positioning Electrical/Communication Interface Integration and Distributed Connection Platform
Install the front area of the control cabinet, main control system back panel, or I/O rack
2、 Main functions and functions
Functional category description
Centralized signal connection integrates scattered signal cables, communication lines, or power lines into a unified control system.
Physical interface standardization provides standardized interfaces (such as D-sub, MIL, terminal block) for easy cable management and quick replacement.
Signal protection between electrical isolation/protection and control systems is achieved through optocouplers or lightning arresters (optional function).
Easy to maintain clear interface identification and modular layout, facilitating troubleshooting and system upgrades.
3、 Typical application areas
This module is suitable for signal aggregation and management of sub modules within the following TEL systems:
1. Gas delivery system (GAS BOX)
Interface MFC, valve drive board, flow monitor;
Manage the input and output of gas path signals.
2. Vacuum system control
Vacuum pump start stop, vacuum gauge signal input;
Summary of interlocking control signals and alarm signals.
3. Chamber temperature control system
Heater switch, power signal, thermocouple/RTD sensor signal input connection.
4. Wafer handling/robotic arm system
Position sensors for process arms and lifting platforms;
Safety door interlock and action completion feedback.
2.产 品 展 示
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| K32HCHJ-LEK-M2-01 | 6SC6101-3A-Z | IMASI23 |
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| K31HRLG-LDK-NS-00 | 6SC6508-4AA02 | IMSED01 |
| K31HRHJ-LNK-NS-00 | 6SC6502-0AF01 | IEPDF02 |
| K31HMHJ-LNK-NS-00 | 6SC6190-0FB61 | IEPAS02 |
| K31HLLG-LNK-NS-01 | PSR45-220 | IMASI02 |
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