TEL Tokyo Electron 1D81-000140接口板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1D81-000140 接口板（Interface Board） 是一款用于半导体设备内部的关键信号接口模块，主要用于控制系统与执行/检测单元之间的信号交互、隔离与转接。该接口板是 TEL 设备控制体系中不可或缺的一部分，具备高可靠性、多通道支持以及出色的抗干扰性能。
一、产品基础信息
| 项目 | 内容 |
|---|---|
| 产品名称 | 接口板（Interface Board） |
| 产品型号 | 1D81-000140 |
| 制造商 | Tokyo Electron Ltd. (TEL) |
| 板卡系列 | 属于 1D81 系列（用于信号输入/输出与功能扩展） |
| 使用位置 | 安装于控制机柜、IO接口框或功能模块背板中 |
二、主要功能用途
| 功能类别 | 功能说明 |
|---|---|
| 信号中转与适配 | 将控制器输出信号转换为设备可识别的电压/电流信号，或反之。 |
| 输入输出接口集成 | 提供多路 DI（数字输入）、DO（数字输出）、AI（模拟输入）或 AO（模拟输出）接口。 |
| 信号隔离与保护 | 提供光耦或继电器隔离，保护主控系统免受过压/过流影响。 |
| 设备联锁与状态采集 | 采集腔体、阀门、温度、电流等系统状态，作为系统运行条件判断依据。 |
三、典型应用系统
1. TEL 晶圆处理设备中信号采集与联锁控制：
例：TEL Trias™ ALD、Unity™ CVD、Telius™ Etch、Clean Track™ 系列
2. 用于以下功能模块中的信号桥接：
| 系统模块 | 应用说明 |
|---|---|
| 气体供给单元（GAS UNIT） | 接收/控制 MFC、阀门、压力传感器信号 |
| 腔体温控系统 | 监测温度信号，控制加热器、冷却器开关 |
| 真空系统控制 | 接收真空计信号、控制真空泵和真空阀 |
| 自动化搬运系统 | 与传感器、工艺臂等部件进行信号交换 |
英文资料：
TEL Tokyo Electron 1D81-000140 Interface Board is a critical signal interface module used inside semiconductor equipment, mainly for signal interaction, isolation, and transfer between control systems and execution/detection units. This interface board is an indispensable part of the TEL device control system, with high reliability, multi-channel support, and excellent anti-interference performance.
1、 Product basic information
Project Content
Product Name: Interface Board
Product model 1D81-000140
Manufacturer Tokyo Electron Ltd. (TEL)
The board series belongs to the 1D81 series (used for signal input/output and function expansion)
Installed in the control cabinet, IO interface box, or functional module backplane for use
2、 Main functional purpose
Function Category Function Description
Signal relay and adaptation convert the controller output signal into a voltage/current signal recognizable by the device, or vice versa.
The input-output interface integration provides multiple DI (digital input), DO (digital output), AI (analog input), or AO (analog output) interfaces.
Signal isolation and protection provide optocoupler or relay isolation to protect the main control system from overvoltage/overcurrent effects.
Equipment interlocking and status acquisition collect system status such as chambers, valves, temperature, current, etc., as the basis for judging system operating conditions.
3、 Typical application system
1. Signal acquisition and interlocking control in TEL wafer processing equipment:
Example: TEL Trias ™ ALD、Unity ™ CVD、Telius ™ Etch、Clean Track ™ series
2. Used for signal bridging in the following functional modules:
System module application instructions
Gas supply unit (GAS UNIT) receives/controls signals from MFC, valves, and pressure sensors
The temperature control system of the cavity monitors temperature signals and controls the switches of the heater and cooler
Vacuum system control receives vacuum gauge signals, controls vacuum pumps and vacuum valves
Automated handling systems exchange signals with sensors, process arms, and other components
2.产 品 展 示
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