TEL Tokyo Electron EC81-000016-11电路板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron EC81-000016-11 电路板 是一款应用于TEL半导体设备中的专用功能板卡，广泛用于设备的控制系统、通信接口或I/O管理中。该型号编号属于 TEL 的 EC81 系列，通常用于集成电气控制、通信管理、设备联锁等功能。
一、基本信息
| 项目 | 内容 |
|---|---|
| 产品名称 | 电路板（Circuit Board / PCB Assembly） |
| 产品型号 | EC81-000016-11 |
| 制造商 | Tokyo Electron Ltd. (TEL) |
| 类别 | 控制/通信/信号管理功能板卡 |
二、可能功能（基于EC81系列功能结构推测）
虽然官方对 EC81-000016-11 的详细公开资料有限，但根据 TEL 编号体系与同类 EC81 系列板卡的结构，该电路板可能具备以下功能：
| 功能类别 | 功能说明 |
|---|---|
| 信号处理功能 | 对来自传感器、执行器、继电器板等的信号进行放大、滤波或转换。 |
| 通信桥接 | 充当主控系统与下位模块间的通信桥梁，支持 RS-232、RS-485 或 TEL 专有协议。 |
| I/O 接口管理 | 提供数字/模拟输入输出接口，用于控制设备如泵、阀、加热器等。 |
| 控制逻辑单元 | 内嵌简单控制逻辑（如状态切换、定时控制）用于分布式控制。 |
三、典型应用领域
EC81-000016-11 电路板通常用于以下 TEL 系统：
1. 晶圆处理系统
用于清洗、显影、涂胶等模块中，控制液体流量、阀门动作等。
2. 真空系统
控制真空泵、腔体压力传感器、真空阀门等子系统。
3. 温度与加热控制
管理加热元件温度采样及闭环调节逻辑。
4. 设备内互锁/安全系统
采集门锁、腔盖、光电传感器等信号，实现联锁控制。
英文资料：
The TEL Tokyo Electron EC81-000016-11 circuit board is a specialized functional board used in TEL semiconductor equipment, widely used in equipment control systems, communication interfaces, or I/O management. This model number belongs to TEL's EC81 series and is typically used for integrating electrical control, communication management, equipment interlocking, and other functions.
1、 Basic Information
Project Content
Product Name: Circuit Board/PCB Assembly
Product model EC81-000016-11
Manufacturer Tokyo Electron Ltd. (TEL)
Category Control/Communication/Signal Management Function Board
2、 Possible functions (speculated based on the EC81 series functional structure)
Although the official detailed public information on EC81-000016-11 is limited, according to the TEL numbering system and the structure of similar EC81 series cards, this circuit board may have the following functions:
Function Category Function Description
The signal processing function amplifies, filters, or converts signals from sensors, actuators, relay boards, etc.
The communication bridge serves as a communication bridge between the main control system and lower level modules, supporting RS-232, RS-485, or TEL proprietary protocols.
I/O interface management provides digital/analog input/output interfaces for controlling devices such as pumps, valves, heaters, etc.
The control logic unit is embedded with simple control logic (such as state switching, timing control) for distributed control.
3、 Typical application areas
EC81-000016-11 circuit board is commonly used in the following TEL systems:
1. Wafer processing system
Used in modules such as cleaning, developing, and gluing to control liquid flow and valve action.
2. Vacuum system
Control subsystems such as vacuum pump, chamber pressure sensor, vacuum valve, etc.
3. Temperature and Heating Control
Manage the temperature sampling and closed-loop regulation logic of heating elements.
4. Interlocking/safety system within the device
Collect signals from door locks, chamber covers, photoelectric sensors, etc. to achieve interlocking control.
2.产 品 展 示
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