TEL Tokyo Electron 1D81-000128接口继电器板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1D81-000128 接口继电器板（Interface Relay Board） 是一款专为半导体制造设备设计的模块，用于信号隔离、输入输出控制与电气保护。该模块是 TEL 系统中连接主控制器与执行部件之间的关键接口，广泛应用于等离子蚀刻、CVD、清洗等多种设备中。
一、产品基本信息
| 项目 | 内容 |
|---|---|
| 产品名称 | 接口继电器板（Interface Relay Board） |
| 产品型号 | 1D81-000128 |
| 制造商 | Tokyo Electron Ltd. (TEL) |
| 类型 | 电气信号转换与隔离模块 |
二、主要功能
1D81-000128 继电器板在 TEL 设备中通常承担以下职责：
| 功能类别 | 描述 |
|---|---|
| 信号隔离 | 将主控制器与高压/强电执行模块隔离，提升系统安全性与稳定性。 |
| 信号转换 | 将 TTL/PLC 控制信号转换为继电器触点信号，驱动外部设备。 |
| 输出驱动 | 控制电磁阀、接触器、报警装置、执行电机等负载。 |
| 输入反馈采集 | 接收外部动作反馈信号（如门限开关、行程开关）并送回主控制器。 |
三、典型应用领域
该接口继电器板适用于 TEL 半导体设备中的以下系统和模块：
1. 真空腔体控制系统
控制真空泵、阀门动作；
实现腔体压力状态的控制与反馈。
2. 气体供应系统（GAS BOX）
控制质量流量控制器（MFC）；
驱动供气阀门并进行联锁。
3. 晶圆传输系统
控制工艺臂、升降机构、夹具系统；
实现晶圆位置状态输入采集。
4. 加热与冷却系统
控制加热单元电源开关；
实现加热状态反馈监控。
英文资料：
TEL Tokyo Electron 1D81-000128 Interface Relay Board is a module designed specifically for semiconductor manufacturing equipment, used for signal isolation, input/output control, and electrical protection. This module is a key interface connecting the main controller and execution components in TEL systems, widely used in plasma etching CVD、 Cleaning and other equipment.
1、 Basic Product Information
Project Content
Product Name: Interface Relay Board
Product model 1D81-000128
Manufacturer Tokyo Electron Ltd. (TEL)
Type Electrical Signal Conversion and Isolation Module
2、 Main functions
The 1D81-000128 relay board typically assumes the following responsibilities in TEL equipment:
Functional category description
Signal isolation isolates the main controller from the high-voltage/strong current execution module, enhancing system safety and stability.
Signal conversion converts TTL/PLC control signals into relay contact signals to drive external devices.
Output drive controls loads such as solenoid valves, contactors, alarm devices, and executive motors.
Input feedback collection receives external action feedback signals (such as threshold switches, travel switches) and sends them back to the main controller.
3、 Typical application areas
This interface relay board is suitable for the following systems and modules in TEL semiconductor equipment:
1. Vacuum chamber control system
Control the action of vacuum pumps and valves;
Realize control and feedback of chamber pressure status.
2. Gas supply system (GAS BOX)
Control Mass Flow Controller (MFC);
Drive the gas supply valve and interlock it.
3. Wafer transfer system
Control the process arm, lifting mechanism, and fixture system;
Implement wafer position status input acquisition.
4. Heating and cooling system
Control the power switch of the heating unit;
Implement heating status feedback monitoring.
2.产 品 展 示
3.其他产品
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