TEL Tokyo Electron 1D81-000118电子控制单元 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1D81-000118 电子控制单元（Electronic Control Unit, ECU） 是一款高度集成的控制模块，广泛用于 TEL 半导体制造设备中，用于对关键子系统进行精准的逻辑控制、状态监测及动作协调。
一、基本信息
产品名称：电子控制单元（Electronic Control Unit）
产品型号：1D81-000118
制造商：Tokyo Electron Limited (TEL)
功能类别：嵌入式控制模块 / 分布式控制单元（DCU）
二、主要功能
该控制单元作为系统大脑之一，具备以下主要功能：
| 功能类别 | 功能说明 |
|---|---|
| 逻辑控制 | 控制执行部件如电磁阀、马达、泵、传感器等的工作逻辑。 |
| 信号采集与反馈 | 接收温度、压力、气体流量等传感器数据，实时反馈至主系统。 |
| 通信桥接 | 通过CAN、RS485、EtherCAT或专用TEL协议与主控制器通信。 |
| 状态诊断 | 提供故障检测、设备运行状态监控、报警信号输出。 |
三、应用领域
1. 半导体制造核心设备
该控制单元主要用于以下系统模块中：
等离子蚀刻设备（Etchers）
CVD/ALD 成膜系统
光刻显影设备
晶圆清洗与干燥设备
真空系统（泵/阀门控制）
2. 子系统模块控制
腔体加热器温控系统
Mass Flow Controller（MFC）气体流量控制
多轴工艺臂或搬运机械
压力/温度闭环调节系统
英文资料：
TEL Tokyo Electron 1D81-000118 Electronic Control Unit (ECU) is a highly integrated control module widely used in TEL semiconductor manufacturing equipment for precise logic control, status monitoring, and action coordination of critical subsystems.
1、 Basic Information
Product Name: Electronic Control Unit
Product Model: 1D81-000118
Manufacturer: Tokyo Electron Limited (TEL)
Function category: Embedded Control Module/Distributed Control Unit (DCU)
2、 Main functions
As one of the system brains, this control unit has the following main functions:
Function Category Function Description
Logic control controls the working logic of executing components such as solenoid valves, motors, pumps, sensors, etc.
Signal acquisition and feedback receive sensor data such as temperature, pressure, and gas flow rate, and provide real-time feedback to the main system.
The communication bridge communicates with the main controller through CAN, RS485, EtherCAT, or dedicated TEL protocols.
State diagnosis provides fault detection, equipment operation status monitoring, and alarm signal output.
3、 Application Fields
1. Core equipment for semiconductor manufacturing
This control unit is mainly used in the following system modules:
Plasma etching equipment (Etchers)
CVD/ALD film formation system
Photolithography and development equipment
Wafer cleaning and drying equipment
Vacuum system (pump/valve control)
2. Subsystem module control
Temperature control system for cavity heater
Mass Flow Controller (MFC) gas flow control
Multi axis process arm or handling machinery
Pressure/temperature closed-loop regulation system
2.产 品 展 示
3.其他产品
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